Semiconductor device with plate-shaped component
View Patent ↗The invention provides a semiconductor device including a plurality of stacked semiconductor chips, which offers a higher degree of freedom in selecting a chip size of the semiconductor chip and arranging the routing, and increase of the reliability and speed in signal transmission between the semiconductor chips. The semiconductor device includes a lower semiconductor chip, an upper semiconductor chip and a silicon spacer formed between the lower semiconductor chip and the upper semiconductor chip and including a projecting portion projecting farther outward than an outer periphery of the upper semiconductor chip, and the silicon spacer includes through electrodes and reroutings.
1. A semiconductor device, comprising:
a first semiconductor chip;
a second semiconductor chip provided on said first semiconductor chip; and
a plate-shaped component formed between said first semiconductor chip and said second semiconductor chip, and said plate-shaped component including a projecting portion projecting farther outward than an outer periphery of said second semiconductor chip;
wherein said first semiconductor chip includes a plurality of first electrode pads on a surface thereof facing said plate-shaped component,
wherein said second semiconductor chip includes a plurality of second electrode pads and a third electrode pad on a surface thereof facing said plate-shaped component,
wherein said plate-shaped component includes a plurality of through electrodes for connecting said first electrode pads and said second electrode pads, a fourth electrode pad formed on a surface of said projecting portion facing said second semiconductor chip, and an interconnect for directly connecting said third electrode pad and said fourth electrode pad, wherein said third electrode pad and said fourth electrode pad are connected to each other via only said interconnect,
wherein said first electrode pads, said second electrode pads, and said through electrodes are substantially aligned along a single straight line, and
wherein said interconnect is separated from each of said through electrodes.
2. The semiconductor device according to claim 1 , wherein said through electrodes are connected to said first electrode pads and said second electrode pads respectively with a bump bonding.
3. The semiconductor device according to claim 1 , wherein said plate-shaped component comprises a plate-shaped spacer.
4. The semiconductor device according to claim 1 , wherein said plate-shaped component comprises a silicon spacer.
5. The semiconductor device according to claim 4 , wherein said first semiconductor chip and said second semiconductor chip comprise a silicon semiconductor chip.
6. The semiconductor device according to claim 1 , wherein said fourth electrode pad is formed farther outward than an outer periphery of said first semiconductor chip.
7. The semiconductor device according to claim 1 , wherein said fourth electrode pad is connected with wire bonding.
8. The semiconductor device according to claim 1 , further comprising a substrate,
wherein said first semiconductor chip is provided on said substrate, and wherein said second semiconductor chip is provided on said first semiconductor chip.
9. The semiconductor device according to claim 8 , further comprising a reinforcing component formed on said substrate, for sustaining said plate-shaped component at said projecting portion.
10. The semiconductor device according to claim 8 , further comprising a reinforcing component formed on said first semiconductor chip for sustaining said plate-shaped component at said projecting portion.
11. The semiconductor device according to claim 8 , wherein at least one fifth electrode pad is provided on an upper surface of said substrate.
12. The semiconductor device according to claim 11 , wherein said at least one fifth electrode pad is wire bonded to said fourth electrode pad.
13. The semiconductor device according to claim 8 , wherein said substrate is wire bonded to said plate-shaped component.
14. The semiconductor device according to claim 1 , wherein said first semiconductor chip comprises a memory chip, and wherein said second semiconductor chip comprises a logic chip.
15. The semiconductor device according to claim 1 , wherein said first semiconductor chip extends farther than said projecting portion.
16. The semiconductor device according to claim 1 , wherein said interconnect has respective ends inside and outside of an outer periphery of said second semiconductor chip.
17. The semiconductor device according to claim 1 , wherein said plate-shaped component has a thickness in a range of 50 μm to 100 μm.
18. The semiconductor device accordingly to claim 1 , further comprising:
a substrate,
wherein said substrate comprises at least one fifth electrode pad formed on a surface of said substrate at a position outside of an outer periphery of said first semiconductor chip, and
wherein said at least one fifth electrode pad is electrically connected to said fourth electrode pad.
19. The semiconductor device according to claim 1 , wherein said first semiconductor chip is larger than said second semiconductor chip in size, and
wherein said interconnect connects said third electrode pad and said fourth electrode pad without penetrating through said first semiconductor chip.
20. A semiconductor device, comprising:
a first semiconductor chip;
a second semiconductor chip, said second semiconductor chip including at least one electrode pad formed thereon; and
an interposer formed between said first semiconductor chip and said second semiconductor chip, said interposer comprising:
an extended portion extending beyond an outer periphery of said second semiconductor chip;
at least one electrode pad formed on said extended portion;
a plurality of through electrodes extending through said interposer; and
at least one interconnect formed on said interposer,
wherein said at least one electrode pad formed on said second semiconductor chip is rerouted to an area outside of the outer periphery of said second semiconductor chip by said interconnect and connected to said at least one electrode pad formed on said extended portion, and
wherein said interconnect is separated from each of said through electrodes.
21. The semiconductor device according to claim 20 , wherein said first semiconductor chip extends farther than said projecting portion.
22. The semiconductor device according to claim 20 , wherein said interposer comprises a silicon spacer.