Semiconductor device, electrical inspection method thereof, and electronic apparatus including the semiconductor device
View Patent ↗A semiconductor device is arranged so as to include (i) a wire L 1 , connected directly to an LSI chip, which serves as a VGL wire for supplying a voltage VGL to the LSI chip, and (ii) a wire LB 1 connected not directly to but to one of a pair of electrodes of a capacitor provided between the wire LB 1 and a voltage VGH wire, each of the wire L 1 and the wire LB 1 including a voltage input terminal. This arrangement provides (i) a semiconductor device, including a built-in capacitor, which makes it possible to shorten time required in an electrical screening test (final test) so as to reduce cost, and (ii) an electrical inspection method of the semiconductor device.
1. A semiconductor device, comprising:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip;
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip; and
a capacitor provided between the first power supply voltage wire and the second power supply voltage wire,
the first power supply voltage wire and the second power supply voltage wire being provided on a tape carrier on which the semiconductor chip is mounted,
the first power supply voltage wire including:
a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of the capacitor; and
a direct wire connected directly to the semiconductor chip,
each of the bypass wire and the direct wire including a voltage input terminal.
2. The semiconductor device according to claim 1 , wherein, during an electrical screening test, the bypass wire of the first power supply voltage wire is open, and the first power supply voltage is applied to the direct wire of the first power supply voltage wire, and the second power supply voltage is applied to the second power supply voltage wire.
3. The semiconductor device according to claim 1 , wherein the first power supply voltage is applied to the bypass wire and the direct wire of the first power supply voltage wire during normal operation.
4. A method for electrically inspecting a semiconductor device which includes:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip;
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip; and
a capacitor provided between the first power supply voltage wire and the second power supply voltage wire,
the first power supply voltage wire and the second power supply voltage wire being provided on a tape carrier on which the semiconductor chip is mounted,
the first power supply voltage wire including:
a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of the capacitor; and
a direct wire connected directly to the semiconductor chip,
each of the bypass wire and the direct wire including a voltage input terminal,
said method comprising the step of supplying the first power supply voltage to the semiconductor chip from the direct wire of the first power supply voltage wire and supplying the second power supply voltage to the semiconductor chip from the second power supply voltage wire,
the step being carried out under such a condition that the bypass wire of the first power supply voltage wire is open.
5. An electronic apparatus comprising a semiconductor device which includes:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip; and
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip; and
a capacitor provided between the first power supply voltage wire and the second power supply voltage wire,
the first power supply voltage wire and the second power supply voltage wire being provided on a tape carrier on which the semiconductor chip is mounted,
the first power supply voltage wire including:
a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of the capacitor; and
a direct wire connected directly to the semiconductor chip,
each of the bypass wire and the direct wire including a voltage input terminal, and
the first power supply voltage being applied to the bypass wire and the direct wire of the first power supply voltage wire.
6. A semiconductor device, comprising:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip;
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip;
a third power supply voltage wire for supplying a third power supply voltage;
a capacitor provided between the first power supply voltage wire and the second power supply voltage wire; and
another capacitor provided between the second power supply voltage wire and the third power supply voltage wire,
the first power supply voltage wire, the second power supply voltage wire, and the third power supply voltage wire being provided on a tape carrier on which a semiconductor chip is mounted,
the first power supply voltage wire including:
(i) a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of the capacitor disposed between the bypass wire and the second power supply voltage wire; and
(ii) a direct wire connected directly to the semiconductor chip,
each of the bypass wire and the direct wire including a voltage input terminal, and
the second power supply voltage wire including:
(iii) a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of said another capacitor disposed between the bypass wire and the third power supply voltage wire; and
(iv) a direct wire connected directly to the semiconductor chip and to one of a pair of electrodes of the capacitor disposed between the direct wire and the first power supply voltage wire,
each of the bypass wire and the direct wire including a voltage input terminal.
7. The semiconductor device according to claim 6 , wherein, during an electrical screening test, the bypass wire of the first power supply voltage wire and the bypass wire of the second power supply voltage wire are open, and the first power supply voltage is applied to the direct wire of the first power supply voltage wire, and the second power supply voltage is applied to the direct wire of the second power supply voltage wire, and the third power supply voltage is applied to the third power supply voltage wire.
8. The semiconductor device according to claim 6 , wherein, during normal operation, the first power supply voltage is applied to the bypass wire and the direct wire of the first power supply voltage wire, and the second power supply voltage is applied to the bypass wire and the direct wire of the second power supply voltage wire.
9. A method for electrically inspecting a semiconductor device which includes:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip;
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip;
a third power supply voltage wire for supplying a third power supply voltage;
a capacitor provided between the first power supply voltage wire and the second power supply voltage wire; and
another capacitor provided between the second power supply voltage wire and the third power supply voltage wire,
the first power supply voltage wire, the second power supply voltage wire, and the third power supply voltage wire being provided on a tape carrier on which a semiconductor chip is mounted,
the first power supply voltage wire including:
(i) a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of the capacitor disposed between the bypass wire and the second power supply voltage wire; and
(ii) a direct wire connected directly to the semiconductor chip,
each of the bypass wire and the direct wire including a voltage input terminal, and
the second power supply voltage wire including:
(iii) a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of said another capacitor disposed between the bypass wire and the third power supply voltage wire; and
(iv) a direct wire connected directly to the semiconductor chip and to one of a pair of electrodes of the capacitor disposed between the direct wire and the first power supply voltage wire,
each of the bypass wire and the direct wire including a voltage input terminal,
said method comprising the step of supplying the first power supply voltage to the semiconductor chip from the direct wire of the first power supply voltage wire, supplying the second power supply voltage to the semiconductor chip from the second power supply voltage wire, and supplying the third power supply voltage to the semiconductor chip from the third power supply voltage wire,
the step being carried out under such a condition that the bypass wire of the first power supply voltage wire and the bypass wire of the second power supply voltage wire are open.
10. An electronic apparatus comprising a semiconductor device which includes:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip;
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip;
a third power supply voltage wire for supplying a third power supply voltage;
a capacitor provided between the first power supply voltage wire and the second power supply voltage wire; and
another capacitor provided between the second power supply voltage wire and the third power supply voltage wire,
the first power supply voltage wire, the second power supply voltage wire, and the third power supply voltage wire being provided on a tape carrier on which a semiconductor chip is mounted,
the first power supply voltage wire including:
(i) a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of the capacitor disposed between the bypass wire and the second power supply voltage wire; and
(ii) a direct wire connected directly to the semiconductor chip,
each of the bypass wire and the direct wire including a voltage input terminal, and
the second power supply voltage wire including:
(iii) a bypass wire connected not directly to the semiconductor chip but to one of a pair of electrodes of said another capacitor disposed between the bypass wire and the third power supply voltage wire; and
(iv) a direct wire connected directly to the semiconductor chip and to one of a pair of electrodes of the capacitor disposed between the direct wire and the first power supply voltage wire,
each of the bypass wire and the direct wire including a voltage input terminal, and the first power supply voltage being applied to the bypass wire and the direct wire of the first power supply voltage wire, and the second power supply voltage being applied to the bypass wire and the direct wire of the second power supply voltage wire.
11. A semiconductor device, comprising:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip;
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip; and
a third power supply voltage wire connected through a capacitor to the second power supply voltage wire,
the third power supply voltage wire being electrically open during a semiconductor chip test, and the first power supply voltage being applied to the third power supply voltage wire during normal operation.
12. A method for electrically inspecting a semiconductor device which includes: a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip; a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip; and a third power supply voltage wire connected through a capacitor to the second power supply voltage wire,
said method comprising the step of supplying the first power supply voltage through the first power supply voltage wire to the semiconductor chip and supplying the second power supply voltage through the second power supply voltage wire to the semiconductor chip,
the step being carried out under such a condition that the third power supply voltage wire is electrically open.
13. An electronic apparatus comprising the semiconductor device which includes:
a first power supply voltage wire for supplying a first power supply voltage to a semiconductor chip;
a second power supply voltage wire for supplying a second power supply voltage to the semiconductor chip; and
a third power supply voltage wire connected through a capacitor to the second power supply voltage wire,
the third power supply voltage wire being electrically open during a semiconductor chip test, and the first power supply voltage being applied to the third power supply voltage wire during normal operation.