Method and apparatus for forming contact hole
View Patent ↗A method of forming a contact hole in an insulating film coating amorphous Si having an irregular surface formed on an insulating substrate, for connecting the amorphous Si to a conductor film formed on the insulating film, including: etching the insulating film using reactive ion etching to a depth whereat said irregularity does not disappear; and sputter-etching the surface of the amorphous Si.
1. A method of forming a contact hole in an insulating film coating amorphous Si having an irregular surface formed on an insulating substrate, for connecting said amorphous Si to a conductor film formed on said insulating film, said method comprising:
etching said insulating film using reactive ion etching to a depth whereat said irregularity does not disappear;
removing a byproduct of said reactive ion etching using wet etching; and
sputter-etching the surface of said amorphous Si.
2. The method of forming a contact hole according to claim 1 , wherein buffered hydrofluoric acid is used as an etchant for said wet etching.
3. The method of forming a contact hole according to claim 1 , wherein a fluorine-based gas is used in said reactive ion etching.
4. The method of forming a contact hole according to claim 1 , wherein said insulating substrate comprises glass.
5. The method of forming a contact hole according to claim 1 , wherein said insulating substrate comprises a plastic.