Semiconductor thin film crystallization method
View Patent ↗The semiconductor thin film crystallization method comprises the step of forming a semiconductor thin film 14 over a substrate 10; the step of forming band-shaped portion 16 for blocking crystal growth of the semiconductor thin film in the semiconductor film or over the semiconductor film; and the step of causing an energy beam 18 of a continuous wave to scan in a direction intersecting the longitudinal direction of the portion for blocking crystal growth. The energy beam is caused to scan, intersecting the portion for blocking the crystal growth, whereby the crystal growth can be interrupted when the application region of the energy beam intersects the portions for blocking the crystal growth. Even when a solid semiconductor thin film which is not patterned in islands is crystallized, the semiconductor thin film of good crystals can be formed with high yields while the film is prevented from peeling.
1. A semiconductor thin film crystallization method comprising the steps of:
forming a semiconductor thin film over a substrate;
forming a band-shaped portion for blocking crystal growth of the semiconductor thin film in the semiconductor film or over the semiconductor thin film without patterning the semiconductor thin film into islands, the band-shaped portion being formed linearly; and
crystallizing the semiconductor thin film by causing an energy beam of a continuous wave to scan in a direction transverse to both a longitudinal direction of the band-shaped portion for blocking crystal growth, and a longitudinal length of an application region of the energy beam, to thereby crystallize the semiconductor thin film,
wherein in the step of forming the band-shaped potion, a plurality of the band-shaped portions are formed, spaced from each other in a direction transverse to a longitudinal direction of the band-shaped portion, and
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan, sequentially intersecting said plurality of the band-shaped portions.
2. A semiconductor thin film crystallization method according to claim 1 , wherein
the step of forming the band-shaped portion for blocking crystal growth of the semiconductor thin film includes a step of forming a slit in the semiconductor thin film; and
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction transverse to the longitudinal direction of the slits.
3. A semiconductor thin film crystallization method according to claim 2 , wherein
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction substantially perpendicular to the longitudinal direction of the slit.
4. A semiconductor thin film crystallization method according to claim 2 , wherein
in the step of forming the slit, the slit is formed uninterruptedly from one end of the semiconductor thin film to the other end thereof.
5. A semiconductor thin film crystallization method according to claim 2 , wherein
in the step of forming the slit, the slit is formed interruptedly.
6. A semiconductor thin film crystallization method according to claim 2 , wherein
in the step for forming the slit, a plurality of the slits are formed, spaced from each other in a direction transverse to the longitudinal direction of the slits, and
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan, sequentially intersecting the plurality of the slits.
7. A semiconductor thin film crystallization method according to claim 1 , wherein
the step of forming the band-shaped portion for blocking crystal growth of the semiconductor thin film includes a step of forming a dielectric film over the semiconductor thin film, and a step of forming a slit in the dielectric film, and
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction transverse to the longitudinal direction of the slits.
8. A semiconductor thin film crystallization method according to claim 7 , wherein
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction substantially perpendicular to the longitudinal direction of the slit.
9. A semiconductor thin film crystallization method according to claim 7 , wherein
in the step of forming the slit, the slit is formed uninterruptedly from one end of the semiconductor thin film to the other end thereof.
10. A semiconductor thin film crystallization method according to claim 7 , wherein
in the step of forming the slit, the slit is formed interruptedly.
11. A semiconductor thin film crystallization method according to claim 7 , wherein
in the step for forming the slit, a plurality of the slits are formed, spaced from each other in a direction transverse to the longitudinal direction of the slits, and
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan, sequentially intersecting the plurality of the slits.
12. A semiconductor thin film crystallization method according to claim 1 , wherein
the step of forming the band-shaped portion for blocking crystal growth of the semiconductor thin film includes a step of etching partially the surface of the semiconductor thin film to form a band-shaped pattern of the semiconductor thin film in the surface of the semiconductor thin film, and
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction transverse to the longitudinal direction of the band-shaped pattern.
13. A semiconductor thin film crystallization method according to claim 12 , wherein
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction substantially perpendicular to the longitudinal direction of the band-shaped pattern.
14. A semiconductor thin film crystallization method according to claim 12 ,
in the step of forming the band-shaped pattern in the semiconductor thin film, the band-shaped pattern is formed uninterruptedly from one end of the semiconductor thin film to the other end thereof.
15. A semiconductor thin film crystallization method according to claim 12 , wherein
in the step of forming the band-shaped pattern, the band-shaped pattern is formed interruptedly.
16. A semiconductor thin film crystallization method according to claim 1 , wherein
the step of forming the band-shaped portion for blocking crystal growth of the semiconductor thin film includes a step of forming a band-shaped pattern of a metal film over the semiconductor thin film, and
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction transverse to the longitudinal direction of the band-shaped pattern.
17. A semiconductor thin film crystallization method according to claim 16 , wherein
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan in a direction substantially perpendicular to the longitudinal direction of the band-shaped pattern.
18. A semiconductor thin film crystallization method according to claim 16 ,
in the step of forming the band-shaped pattern in the semiconductor thin film, the band-shaped pattern is formed uninterruptedly from one end of the semiconductor thin film to the other end thereof.
19. A semiconductor thin film crystallization method according to claim 16 , wherein
in the step of forming the band-shaped pattern, the band-shaped pattern is formed interruptedly.
20. A semiconductor thin film crystallization method according to claim 1 , wherein
in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan a plurality of items with tracks of the application region of the energy beam overlapping each other.
21. A semiconductor thin film crystallization method according to claim 1 , wherein
the energy beam is a laser beam excited by a semiconductor laser.
22. A semiconductor thin film crystallization method comprising the steps of:
forming a semiconductor thin film over a substrate;
forming a band-shaped portion for blocking crystal growth of the semiconductor thin film in the semiconductor film or over the semiconductor thin film; and
crystallizing the semiconductor thin film by causing an energy beam of a continuous wave to scan in a direction transverse to both a longitudinal direction of the portion for blocking crystal growth, and a longitudinal length of an application region of the energy beam, to thereby crystallize the semiconductor thin film,
wherein in the step of crystallizing the semiconductor thin film, the energy beam is caused to scan a plurality of times with tracks of the application region of the energy beam overlapping each other.