Multi-nozzle ink jet head
View Patent ↗A multi-nozzle ink jet head having a diaphragm that effectively utilizes the force generated by thin-film piezoelectric elements is disclosed. The head ( 2 ) has a head substrate ( 28 ) in which are formed a plurality of nozzles ( 39 ) and a plurality of pressure chambers ( 29 ), a multi-layer diaphragm ( 23 - 1, 23 - 2 ), piezoelectric elements ( 27 ), and individual electrodes ( 26 ). By making the thickness of the common electrode layer ( 23 - 1 ) of the multi-layer diaphragm be thin but such that problems do not occur during multi-pin driving, optimization of the rigid layer becomes possible, and hence it is possible to use the force generated by the thin-film piezoelectric elements efficiently in ink ejection.
1. A multi-nozzle ink jet head having a plurality of nozzles, comprising:
a head substrate in which are formed said plurality of nozzles and a plurality of pressure chambers;
a diaphragm that comprises a common electrode layer and a rigid layer and covers each of said plurality of pressure chambers;
a plurality of piezoelectric elements provided on said diaphragm in correspondence with said pressure chambers; and
a plurality of individual electrodes provided on said piezoelectric elements in correspondence with said piezoelectric elements;
wherein that said common electrode layer has 3 or more earth contacts for connecting with external circuitry, each of said earth contacts being an integral part of said common electrode layer and serving at least two of said piezpelectric elements.
2. The multi-nozzle ink jet head according to claim 1 , wherein a plurality of contact parts are provided for exposing the earth contacts of said common electrode layer from said head.