Component comprising submicron hollow spaces
View Patent ↗An optical component or an analytical platform includes a substrate, an array of microstructures on the substrate and microchannels formed by side walls of adjacent microstructures, a width of the microchannels varies as a function of distance to the substrate, the width continuously decreasing with increasing distance from the substrate within at least one distance-interval. In a method for producing such a component or such a platform a substrate with an array of surface microstructures is coated in a vapor treatment in such a way that shadowing effects of the coating mechanism narrow at least partially a width of the upper parts of side walls of the microstructures thereby forming at least partially embedded microchannels.
1. An optical component comprising:
a substrate; and
microchannels formed by side walls of adjacent microstructures on the substrate, the microchannels being filled with air, the microstructures being covered by a coating and the coating nearly or completely closing the microchannels to substantially separate the microchannels from the environment of the component.
2. An optical component as claimed in claim 1 , forming a wire grid polarizer, the microstructures comprising a metal.
3. The optical component as claimed in claim 2 wherein the metal is silver.
4. The optical component as claimed in claim 2 wherein the metal is silver and the coating covers the silver completely in such a way that no silver is in contact with air.
5. A method for producing an optical component comprising the steps of:
providing a substrate;
providing microstructures on the substrate, wherein side walls of the microstructures form microchannels; and
coating the microstructures thereby nearly or completely closing the microchannels to substantially separate the microchannels from the environment of the component.