Stacked piezoelectric diaphragm members
A diaphragm assembly ( 20 ) comprises at least two piezoelectric diaphragm members ( 22 ) arranged in a stacking direction ( 23 ). An interface layer ( 24 ) is situated between adjacent piezoelectric diaphragm members ( 22 ). The interface layer ( 24 ) in the stacking direction ( 23 ) is displaceable but incompressible. The interface layer ( 24 ) permits lateral movement of the adjacent piezoelectric diaphragm members ( 22 ) relative to the interface layer ( 24 ) in a direction perpendicular to the stacking direction ( 23 ). The interface layer ( 24 ) can comprise, for example, an incompressible liquid or a semi-liquid. A gasket ( 26 ) can be used to seal the incompressible substance in the interface layer if necessary.
1 . A diaphragm assembly comprising:
at least two piezoelectric diaphragm members arranged in a stacking direction;
an interface layer situated between adjacent piezoelectric diaphragm members, the interface layer in the stacking direction being displaceable but incompressible.
2 . The apparatus of claim 1 , wherein the interface layer comprises an incompressible liquid.
3 . The apparatus of claim 2 , wherein a gasket entraps the interface layer between the adjacent piezoelectric diaphragm members.
4 . The apparatus of claim 1 , wherein the interface layer is a semi-liquid.
5 . The apparatus of claim 4 , wherein a gasket entraps the interface layer between the adjacent piezoelectric diaphragm members.
6 . The apparatus of claim 1 , wherein each piezoelectric diaphragm member comprises:
a piezoelectric core;
a metal substrate laminated on a first side of the piezoelectric core; and
an outer metal laminated on a second side of the piezoelectric core.
7 . The apparatus of claim 1 , wherein the interface layer permits lateral movement of the adjacent piezoelectric diaphragm members relative to the interface layer in a direction perpendicular to the stacking direction.
8 . A pump comprising:
a pump body for at least partially defining a pumping chamber, an inlet port, and an outlet port;
a diaphragm assembly situated in the pump body, the diaphragm assembly comprising:
at least two piezoelectric diaphragm members arranged in a stacking direction;
an interface layer situated between adjacent piezoelectric diaphragm members, the interface layer in the stacking direction being displaceable but incompressible.
9 . The apparatus of claim 8 , wherein the interface layer comprises an incompressible liquid.
10 . The apparatus of claim 9 , wherein a gasket entraps the interface layer between the adjacent piezoelectric diaphragm members.
11 . The apparatus of claim 8 , wherein the interface layer comprises a semi- liquid.
12 . The apparatus of claim 11 , wherein a gasket entraps the interface layer between the adjacent piezoelectric diaphragm members.
13 . The apparatus of claim 8 , wherein each piezoelectric diaphragm member comprises:
a piezoelectric core;
a metal substrate laminated on a first side of the piezoelectric core; and
an outer metal laminated on a second side of the piezoelectric core.
14 . The apparatus of claim 8 , wherein the interface layer permits lateral movement of the adjacent piezoelectric diaphragm members relative to the interface layer in a direction perpendicular to the stacking direction.