Flexural resonator sensing device and method
View Patent ↗A flexural resonator includes a piezoelectric material. At least a portion of an electrode having a first surface and a second surface is embedded in the piezoelectric material such that the piezoelectric material is disposed over and in electronic association with the first and second surfaces of the electrode.
1. A fluid sensor comprising a tuning fork resonator, the tuning fork resonator comprising a piezoelectric material, and an electrode comprising at least a first surface and a second surface, at least a portion of the electrode being embedded in the piezoelectric material such that the piezoelectric material is disposed over and in electronic association with the first surface of the electrode, and such that the piezoelectric material is disposed over and in electronic association with the second surface of the electrode, wherein the piezoelectric material comprises at least one of quartz and lithium niobate, wherein the tuning fork resonator comprises a sensing portion having an exposed surface for contacting a fluid, and wherein at least a portion of the electrode is embedded in the sensing portion.
2. The fluid sensor of claim 1 wherein the piezoelectric material comprises a first piezoelectric material disposed over and electronically associated with the first surface of the electrode, and a second piezoelectric material disposed over and electronically associated with the second surface of the electrode.
3. The fluid sensor of claim 2 wherein the first piezoelectric material and the second piezoelectric material are the same type of piezoelectric material.
4. The fluid sensor of claim 2 wherein the first piezoelectric material and the second piezoelectric material are different types of piezoelectric material.
5. The fluid sensor of claim 2 wherein the first piezoelectric material and the second piezoelectric material are physically contiguous.
6. The fluid sensor of claim 2 wherein the first piezoelectric material and the second piezoelectric material are physically discrete.
7. The fluid sensor of claim 2 wherein the first piezoelectric material contacts the first surface of the electrode.
8. The fluid sensor of claim 2 wherein the second piezoelectric material has a thickness, the tuning fork resonator further comprising an intermediate material disposed between the second piezoelectric material and the second surface of the electrode, the intermediate material having a thickness that is less than the thickness of the second piezoelectric material.
9. The fluid sensor of claim 1 further comprising an intermediate material disposed between the piezoelectric material and at least one surface of the electrode.
10. The fluid sensor of claim 1 wherein the second surface of the electrode substantially geometrically opposes the first surface of the electrode.
11. The fluid sensor of claim 1 wherein the first surface of the electrode is a first major surface of the electrode, the second surface of the electrode is a second major surface of the electrode, the first and second major surfaces being substantially parallel to and being substantially geometrically opposed to each other, the electrode further comprising a third minor surface and a fourth minor surface, the third and fourth minor surfaces being substantially parallel to and being substantially geometrically opposed to each other.
12. The fluid sensor of claim 11 wherein the piezoelectric material is disposed adjacent to and in electronic association with each of the third minor surface and the fourth minor surface of the electrode.
13. The fluid sensor of claim 11 further comprising a bondable material disposed adjacent to and in contact with each of the third minor surface and the fourth minor surface of the electrode.
14. The fluid sensor of claim 11 further comprising an insulating material disposed adjacent to and in contact with each of the third minor surface and the fourth minor surface of the electrode.
15. The fluid sensor of claim 1 wherein the entire operative electrode is embedded in the piezoelectric material.
16. An apparatus comprising a flexural resonator, the flexural resonator comprising a sensing portion having an exposed surface for contacting a fluid, a piezoelectric material, and at a least one pair of electrodes configured for generating an electric field between them within the piezoelectric material, the at least one pair of electrodes comprising an internal first electrode, at least a portion of the first electrode being embedded in the piezoelectric material such that substantially opposing surfaces of the first electrode are in electronic association with the piezoelectric material, and an external second electrode, at least a portion of the second electrode having a first surface and a second surface, the first surface thereof being in electronic association with the piezoelectric material, the exposed surface of the sensing portion consisting essentially of the second surface of the second electrode.
17. An apparatus comprising a flexural resonator, the flexural resonator comprising a sensing portion having an exposed surface for contacting a fluid, a piezoelectric material, and at a least one pair of electrodes configured for generating an electric field between them within the piezoelectric material, the at least one pair of electrodes comprising an internal first electrode, at least a portion of the first electrode being embedded in the piezoelectric material such that substantially opposing surfaces of the first electrode are in electronic association with the piezoelectric material, and an external second electrode, at least a portion of the second electrode having a first surface in electronic association with the piezoelectric material, the first and second electrodes being configured such that upon activation, (i) the electric field generated between therebetween is substantially contained within the piezoelectric material, and (ii) the piezoelectric material resonates.
18. The apparatus of claim 16 or 17 wherein the second electrode is grounded.
19. The apparatus of claim 16 or 17 wherein the flexural resonator comprises a tuning fork.
20. The apparatus of any of claims 1 , 16 , or 17 further comprising a temperature sensing element having a sensing surface proximate to a sensing portion of the resonator.
21. A method of using the apparatus of one of claims 1 , 16 , or 17 , the method comprising contacting a sensing portion of the resonator of the apparatus with a fluid, stimulating the fluid-contacted resonator, and monitoring a response of the resonator.
22. The method of claim 21 further comprising determining at least one property of the fluid, the at least one property being determined by correlating the response of the resonator with a property of the fluid in contact therewith.
23. The method of claim 21 wherein the fluid-contacted resonator is stimulated to generate a signal associated with a response of the resonator, and the response of the resonator is monitored by a method comprising communicating the generated signal over a communication path to an electrical circuit comprising signal processing circuitry or data retrieval circuitry.
24. The method of claim 23 wherein the resonator is stimulated with an electronic stimulus.
25. The method of claim 23 wherein the flexural resonator comprises a tuning fork.
26. A fluid sensor comprising a flexural resonator, the flexural resonator comprising a piezoelectric material, and an electrode comprising at least a first surface and a second surface, at least a portion of the electrode being embedded in the piezoelectric material such that the piezoelectric material is disposed over and in electronic association with the first surface of the electrode, and such that the piezoelectric material is disposed over and in electronic association with the second surface of the electrode,
wherein the piezoelectric material comprises at least one of quartz and lithium niobate,
wherein the piezoelectric material comprises a first piezoelectric material disposed over and electronically associated with the first surface of the electrode and a second piezoelectric material disposed over and electronically associated with the second surface of the electrode, and
wherein the second piezoelectric material has a thickness, the flexural resonator further comprising an intermediate material disposed between the second piezoelectric material and the second surface of the electrode, the intermediate material having a thickness that is less than the thickness of the second piezoelectric material.
27. A fluid sensor as set forth in claim 26 wherein the flexural resonator comprises a tuning fork.
28. A fluid sensor comprising a flexural resonator, the flexural resonator comprising a piezoelectric material, an electrode comprising at least a first surface and a second surface, and an intermediate material, at least a portion of the electrode being embedded in the piezoelectric material such that the piezoelectric material is disposed over and in electronic association with the first surface of the electrode and such that the piezoelectric material is disposed over and in electronic association with the second surface of the electrode, the intermediate material being disposed between the piezoelectric material and at least one surface of the electrode, wherein the piezoelectric material comprises at least one of quartz and lithium niobate.
29. A fluid sensor as set forth in claim 28 wherein the flexural resonator comprises a tuning fork.