IP Library Granted Patent US 7,137,714
Granted Patent B2
US 7,137,714 · App. 11/114,189 · Granted Nov 21, 2006

Apparatus for optical beam shaping and diffusing and associated methods

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Quick Facts
Patent No.
US 7,137,714
App. No.
11/114,189
Granted
Nov 21, 2006
Kind
B2
Abstract

This invention relates to an apparatus for optical beam shaping and diffusing, a method for making the apparatus, and a method for using the apparatus. The apparatus comprises a crystalline material object shaped to fit within an optical train and with a pattern of surface texture along an optical path. Surface removal processes are applied to a portion of a surface of an object made of a crystalline material to form a surface texture pattern at that portion of the surface of the object. The surface texture pattern depends upon: (1) the identity of the crystalline material and (2) the orientation of crystal lattice axes within the object with respect to the portion of the surface of the object where the pattern of surface texture is to be formed. Processes for making the apparatus include, but are not limited to, mechanical grinding, ablating, chemical etching, plasma etching, ion milling, and combinations thereof. The arrangement of the pattern of surface texture can be refined by coupling lithographic patterning methods with any of the surface removal processes. The apparatus can be used to change one or more of: (1) a shape, (2) an orientation, (3) an aspect ratio, (4) an angular pupil distribution, and (5) an intensity profile of a cross section of an optical beam.

Claims (21)

1. An apparatus for optical beam shaping and diffusing, comprising an object made of a single crystalline material having crystal lattice axes, wherein a portion of a surface of said object includes a pattern of texture configured so that, when said object is rotated about an axis of said crystal lattice axes and an optical beam impinges said portion, an angular orientation of a cross section of the optical beam changes while an aspect ratio of the cross section of the optical beam is maintained.

2. The apparatus of claim 1 , wherein said object has a substantially cylindrical shape, and wherein a longitudinal axis of said object corresponds to said axis of said crystal lattice axes.

3. An apparatus for optical beam shaping and diffusing, comprising an object made of a single crystalline material, wherein a portion of a surface of said object includes a pattern of texture configured so that, when said object is rotated about an axis of said crystal lattice axes and an optical beam impinges said portion, an aspect ratio of the a cross section of the optical beam changes while an angular orientation of the cross section of the optical beam is maintained.

4. The apparatus of claim 3 , wherein said object has a substantially cylindrical shape, and wherein a longitudinal axis of said object corresponds to said axis of said crystal lattice axes.

5. An apparatus for optical beam shaping and diffusing, comprising an object made of a single crystalline material having crystal lattice axes, wherein a portion of a surface of said object includes a pattern of texture configured so that, when said object is rotated about a first axis of said crystal lattice axes and an optical beam impinges said portion, an angular orientation of a cross section of the optical beam changes, and when said object is rotated about a second axis of said crystal lattice axes and the optical beam impinges said portion, an aspect ratio of the cross section of the optical beam changes.

6. The apparatus of claim 5 , wherein said object has a substantially spherical shape.

7. A method for making an apparatus for optical beam shaping and diffusing, comprising the steps of:

(1) orientating crystal lattice axes within an object made of a single crystalline material, wherein an orientation of the crystal lattice axes is such that, when an optical beam impinges a portion of a surface of the object, one or more of aspect ratio and an angular orientation of a cross section of the optical beam changes;

(2) forming a pattern of texture on the portion of the surface of the object; and

(3) shaping the object to have a substantially cylindrical shape, wherein a longitudinal axis of the object coincides with an axis of the crystal lattice axes, and wherein the object is configured to be rotated about the longitudinal axis to change the angular orientation of the cross section of the optical beam while maintaining the aspect ratio of the cross section of the optical beam.

8. The method of claim 7 , wherein the pattern of texture is determined using a Fourier Transform analysis.

9. A method for making an apparatus for optical beam shaping and diffusing, comprising the steps of:

(1) orientating crystal lattice axes within an object made of a single crystalline material, wherein an orientation of the crystal lattice axes is such that, when an optical beam impinges a portion of a surface of the object, one or more of an aspect ratio and an angular orientation of a cross section of the optical beam changes;

(2) forming a pattern of texture on the portion of the surface of the object; and

(3) shaping the object to have a substantially cylindrical shape, wherein a longitudinal axis of the object coincides with an axis of the crystal lattice axes, and wherein the object is configured to be rotated about the longitudinal axis to change the aspect ratio of the cross section of the optical beam while maintaining the angular orientation of the cross section of the optical beam.

10. The method of claim 9 , wherein the pattern of texture is determined using a Fourier Transform analysis.

11. A method for making an apparatus for optical beam shaping and diffusing, comprising the steps of:

(1) orientating crystal lattice axes within an object made of a single crystalline material, wherein an orientation of the crystal lattice axes is such that, when an optical beam impinges a portion of a surface of the object, one or more of an aspect ratio and an angular orientation of a cross section of the optical beam changes;

(2) forming a pattern of texture on the portion of the surface of the object; and

(3) shaping the object to have a substantially spherical shape, wherein a first axis of the object coincides with a first axis of the crystal lattice axes, wherein the object is configured to be rotated about the first axis of the object to change the angular orientation of the cross section of the optical beam, wherein a second axis of the object coincides with a second axis of the crystal lattice axes, and wherein the object is configured to be rotated about the second axis of the object to change the aspect ratio of the cross section of the optical beam.

12. The method of claim 11 , wherein the pattern of texture is determined using a Fourier Transform analysis.

Assignments (4)
MERGER Recorded Nov 17, 2006
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 018532/0901 →
CONVERSION Recorded Nov 17, 2006
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 018534/0375 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2005
From: HANSEN, MATTHEW E.
To: ASML US, INC.
Reel/Frame 016506/0846 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2005
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 016506/0849 →