Multi-chip module and method of manufacture
View Patent ↗A multi-chip module and a method for manufacturing the multi-chip module. A first semiconductor chip is mounted to a support substrate and a second semiconductor chip is mounted to the first semiconductor chip. The second semiconductor chip has a smaller dimension than the first semiconductor chip. A spacer is coupled to the second semiconductor chip. Bonding pads on the first and second semiconductor chips are wirebonded to bonding pads on the support substrate. A third semiconductor chip is mounted to the spacer and bonding pads on the third semiconductor chip are wirebonded to bonding pads on the support substrate.
1. A method for manufacturing a multi-chip module, comprising:
providing a support substrate having first and second major surfaces, wherein the support substrate has a chip receiving area and a plurality of bonding pads disposed on the first major surface;
coupling a penultimate semiconductor chip to the chip receiving area, the penultimate semiconductor chip having a plurality of bonding pads;
coupling an interlevel semiconductor chip between the semiconductor chip receiving area and the penultimate semiconductor chip, wherein the interlevel semiconductor chip is larger than the penultimate semiconductor chip and has a plurality of bonding pads;
coupling at least one bonding pad of the plurality of bonding pads on the penultimate semiconductor chip to a first bonding pad of the plurality of bonding pads on the first major surface;
coupling a spacer to a portion of the penultimate semiconductor chip;
coupling an ultimate semiconductor chip to the spacer after coupling the at least one bonding pad of the plurality of bonding pads of the penultimate semiconductor chip to the at least one bonding pad of the plurality of bonding pads on the first major surface, wherein the ultimate semiconductor chip is larger than the penultimate semiconductor chip and has a plurality of bonding pads; and
coupling at least one bonding pad of the ultimate semiconductor chip to a second bonding pad of the plurality of bonding pads on the first major surface.
2. The method of claim 1 , wherein coupling at least one bonding pad of the plurality of bonding pads on the penultimate semiconductor chip to the first bonding pad of the plurality of bonding pads on the first major surface comprises coupling a first bonding pad on the penultimate semiconductor chip to the first bonding pad on the first major surface.
3. The method of claim 2 , wherein coupling the first bonding pad on the penultimate semiconductor chip to the first bonding pad on the first major surface includes wirebonding the first bonding pad on the penultimate semiconductor chip to the first bonding pad on the first major surface.
4. The method of claim 2 , wherein coupling at least one bonding pad of the ultimate semiconductor chip to the second bonding pad of the plurality of bonding pads on the first major surface comprises coupling a first bonding pad on the ultimate semiconductor chip to the second bonding pad on the first major surface.
5. The method of claim 4 , wherein coupling the first bonding pad on the ultimate semiconductor chip to the second bonding pad on the first major surface includes wirebonding the first bonding pad on the ultimate semiconductor chip to the second bonding pad on the first major surface.
6. The method of claim 1 , further including coupling a first bonding pad on the interlevel semiconductor chip to a third bonding pad on the first major surface.
7. The method of claim 6 , wherein coupling the first bonding pad on the interlevel semiconductor chip to the third bonding pad on the first major surface includes wirebonding the first bonding pad on the interlevel semiconductor chip to the third bonding pad on the first major surface.
8. The method of claim 7 , wherein coupling the interlevel semiconductor chip between the semiconductor chip receiving area and the penultimate semiconductor chip comprises:
bonding the interlevel semiconductor chip to the chip receiving area; and
bonding the penultimate semiconductor chip to the interlevel semiconductor chip; and further including
coupling the first bonding pad on the interlevel semiconductor chip to the first bonding pad on the first major surface before bonding the penultimate semiconductor chip to the interlevel semiconductor chip.
9. The method of claim 7 , wherein coupling the interlevel semiconductor chip between the semiconductor chip receiving area and the penultimate semiconductor chip comprises:
bonding the interlevel semiconductor chip to the chip receiving area; and
bonding the penultimate semiconductor chip to the interlevel semiconductor chip; and further including
coupling the first bonding pad on the interlevel semiconductor chip to the first bonding pad on the first major surface after bonding the penultimate semiconductor chip to the interlevel semiconductor chip.
10. The method of claim 1 , further including forming a protective structure over the penultimate semiconductor chip and the ultimate semiconductor chip.
11. A method for manufacturing a multi-chip module, comprising:
providing a support substrate having first and second major surfaces, wherein the support substrate has a chip receiving area and a plurality of bonding pads;
coupling a first semiconductor chip to the chip receiving area, the first semiconductor chip having a plurality bonding pads;
coupling a second semiconductor chip to the first semiconductor chip, the second semiconductor chip having a plurality of bonding pads;
coupling a first bonding pad of the plurality of bonding pads on the first semiconductor chip to a first bonding pad of the plurality of bonding pads on the support substrate;
coupling a first bonding pad of the plurality of bonding pads on the second semiconductor chip to a second bonding pad of the plurality of bonding pads on the support substrate;
coupling a third semiconductor chip having a plurality of bonding pads to the second semiconductor chip, wherein the third semiconductor chip is larger than the second semiconductor chip; and
coupling a first bonding pad of the plurality of bonding pads on the third semiconductor chip to a third bonding pad of the plurality of bonding pads on the support substrate.
12. The method of claim 11 , wherein the first semiconductor chip is larger than the second semiconductor chip.
13. The method of claim 11 , further including coupling the first bonding pad of the plurality of bonding pads on the first semiconductor chip to the first bonding pad of the plurality of bonding pads on the support substrate before coupling the second semiconductor chip to the first semiconductor chip.
14. The method of claim 11 , further including coupling the first bonding pad of the plurality of bonding pads on the first semiconductor chip to the first bonding pad of the plurality of bonding pads on the support substrate after coupling the second semiconductor chip to the first semiconductor chip.
15. The method of claim 11 , wherein coupling the first bonding pads of the first second, and third semiconductor chips to the first, second, and third bonding pads of the plurality of bonding pads on the support substrate includes wirebonding the first bonding pads of the first, second, and third semiconductor chips to the first, second, and third bonding pads of the plurality of bonding pads on the support substrate, respectively.
16. The method of claim 11 , wherein coupling the third semiconductor chip to the second semiconductor chip includes forming a spacer on the second semiconductor chip and mating the third semiconductor chip with the spacer.