IP Library Granted Patent US 7,344,961
Granted Patent B2
US 7,344,961 · App. 11/117,702 · Granted Mar 18, 2008

Methods for nanowire growth

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Quick Facts
Patent No.
US 7,344,961
App. No.
11/117,702
Granted
Mar 18, 2008
Kind
B2
Abstract

The present invention is directed to methods to produce, process, and exploit nanomaterials, and particularly elongated nanowire materials. The invention provides a method for producing nanowires that includes providing a thin film of a catalyst material with varying thickness on a substrate, heating the substrate and thin film, such that the thin film disassociates at the relatively thinner regions and vapor depositing a semiconductor onto the substrate to produce nanowires. A method is also provided in which two or more thin films of different materials are overlayed over a substrate, selectively etching the first underlying thin film to create a plurality of islands of the second thin film that mask portions of the first thin film and expose other portions and growing nanowires on the first thin film. Additional methods for producing nanowires are provided.

Claims (16)

1. A method for producing nanowires comprising:

providing at least a first thin film of a first catalyst material on a growth substrate;

overlying the first thin film with at least one second thin film made from a second material different than the first catalyst material, the second thin film forming a plurality of islands on the first thin film;

selectively etching the first underlying thin film, whereby the plurality of islands of the second thin film mask selected portions of the first thin film and expose other regions of the first thin film that are removed by etching; and

growing a population of nanowires on the first thin film.

2. The method of claim 1 , wherein the first thin film has a different thickness than the second thin film.

3. The method of claim 2 , wherein the first thin film is thinner than the second thin film.

4. The method of claim 1 , wherein the first thin film is less than about 10 nm in thickness.

5. The method of claim 1 , wherein the first thin film is less than about 5 nm in thickness.

6. The method of claim 1 , wherein the first thin film is less than about 2 nm in thickness.

7. The method of claim 1 , wherein the second thin film is less than about 10 nm in thickness.

8. The method of claim 1 , wherein the second thin film is less than about 5 nm in thickness.

9. The method of claim 1 , further comprising removing the second thin film by etching following the step of selectively etching the first thin film.

10. The method of claim 9 , further comprising coating at least a portion of the first thin film with a colloid suspension of the first catalyst material.

11. The method of claim 10 , wherein the first catalyst material comprises gold (Au).

12. The method of claim 11 , wherein the second catalyst material comprises chromium (Cr).

Assignments (10)
PATENT SECURITY AGREEMENT Recorded Jul 26, 2024
From: ONED MATERIAL, INC.
To: VOLTA ENERGY TECHNOLOGIES, LLC, AS COLLATERAL AGENT
Reel/Frame 068174/0120 →
CHANGE OF NAME Recorded Jul 31, 2020
From: ONED MATERIAL LLC
To: ONED MATERIAL, INC.
Reel/Frame 053375/0462 →
RELEASE OF SECURITY INTEREST Recorded Oct 15, 2016
From: MPEG LA, L.L.C
To: ONED MATERIAL LLC
Reel/Frame 040373/0380 →
RELEASE OF SECURITY INTEREST Recorded Oct 15, 2016
From: MPEG LA, L.L.C
To: ONED MATERIAL LLC
Reel/Frame 040373/0484 →
SECURITY INTEREST Recorded Nov 5, 2014
From: ONED MATERIAL LLC
To: MPEG LA, L.L.C.
Reel/Frame 034171/0227 →
SECURITY INTEREST Recorded Mar 14, 2014
From: ONED MATERIAL LLC
To: MPEG LA, L.L.C.
Reel/Frame 032447/0937 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 13, 2014
From: NANOSYS, INC.
To: ONED MATERIAL LLC
Reel/Frame 032264/0148 →
RELEASE OF SECURITY INTEREST Recorded Jun 12, 2013
From: NANOSYS, INC.
To: NANOSYS, INC.
Reel/Frame 030599/0907 →
SECURITY AGREEMENT Recorded Apr 25, 2013
From: PRVP HOLDINGS, LLC
To: NANOSYS, INC.
Reel/Frame 030285/0829 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 4, 2005
From: ROMANO, LINDA T.; HAMILTON, JAMES M.
To: NANOSYS, INC.
Reel/Frame 016355/0497 →