Systems and methods for harvesting and integrating nanowires
View Patent ↗The present invention is directed to methods to harvest, integrate and exploit nanomaterials, and particularly elongated nanowire materials. The invention provides methods for harvesting nanowires that include selectively etching a sacrificial layer placed on a nanowire growth substrate to remove nanowires. The invention also provides methods for integrating nanowires into electronic devices that include placing an outer surface of a cylinder in contact with a fluid suspension of nanowires and rolling the nanowire coated cylinder to deposit nanowires onto a surface. Methods are also provided to deposit nanowires using an ink-jet printer or an aperture to align nanowires. Additional aspects of the invention provide methods for preventing gate shorts in nanowire based transistors. Additional methods for harvesting and integrating nanowires are provided.
1. A nanowire deposited on a substrate surface such that a long axis of the nanowire is aligned substantially parallel to the substrate surface, the nanowire comprising a semiconductor core, an oxide shell layer disposed about the core, and a metal shell layer deposited on the oxide shell layer, wherein the semiconductor core is provided recessed within the oxide shell layer.
2. The nanowire of claim 1 , wherein the semiconductor core is partially selectively etched at one or more of its ends relative to the oxide shell layer.
3. The nanowire of claim 2 , wherein the semiconductor core comprises silicon.
4. The nanowire of claim 1 , wherein the nanowire is formed from a catalyst particle.
5. A nanowire deposited on a substrate surface such that a long axis of the nanowire is aligned substantially parallel to the substrate surface, the nanowire comprising a core and one or more outer shell layers disposed about the core, wherein the core comprises silicon and is provided recessed within the one or more outer shell layers.
6. The nanowire of claim 5 , wherein the one or more outer shell layers comprises an oxide shell layer.
7. The nanowire of claim 6 , further comprising a metal shell layer deposited on the oxide shell layer.
8. The nanowire of claim 5 , wherein the nanowire is formed from a catalyst particle.