IP Library › Patent Application 11120929
Patent Application Utility
App. No. 11/120,929 · Confirmation No. 3946

Immersion exposure tool cleaning system and method

Inventor: Stefan Brandl
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2008-07-30 ABN Abandonment 2 View
2008-01-08 CTNF Non-Final Rejection 12 View
2008-01-08 892 List of references cited by examiner 1 View
2008-01-08 SRFW Search information including classification, databases and other search related notes 1 View
2008-01-02 SRNT Examiner's search strategy and results 2 View
2007-10-31 WFEE Fee Worksheet (SB06) 1 View
2007-10-31 WCLM Claims Worksheet (PTO-2022) 1 View
2007-10-24 RCEX Request for Continued Examination (RCE) 1 View
2007-10-24 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-10-24 CLM Claims 6 View
2007-10-24 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2007-10-24 WFEE Fee Worksheet (SB06) 2 View
2007-10-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-10-02 CTAV Advisory Action (PTOL-303) 3 View
2007-09-27 WFEE Fee Worksheet (SB06) 1 View
2007-09-24 A.NE Response After Final Action 1 View
2007-09-24 CLM Claims 6 View
2007-09-24 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2007-09-24 AF/D Affidavit-submitted prior to Mar 15, 2013 17 View
2007-09-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-07-24 CTFR Final Rejection 14 View
2007-07-24 1449 List of References cited by applicant and considered by examiner 1 View
2007-07-24 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2007-04-11 CTFR Final Rejection 14 View
2007-04-11 1449 List of References cited by applicant and considered by examiner 1 View
2007-04-11 SRFW Search information including classification, databases and other search related notes 1 View
2007-03-31 SRNT Examiner's search strategy and results 1 View
2006-12-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-12-07 CLM Claims 6 View
2006-12-07 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-12-07 WFEE Fee Worksheet (SB06) 1 View
2006-11-09 NTC.PUB Notice of Publication 1 View
2006-09-25 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-09-25 FOR Foreign Reference 25 View
2006-09-25 FOR Foreign Reference 18 View
2006-09-07 CTNF Non-Final Rejection 9 View
2006-09-07 1449 List of References cited by applicant and considered by examiner 3 View
2006-09-07 892 List of references cited by examiner 1 View
2006-09-07 BIB Bibliographic Data Sheet 1 View
2006-09-07 SRFW Search information including classification, databases and other search related notes 1 View
2006-09-01 SRNT Examiner's search strategy and results 2 View
2006-05-12 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-05-03 TRNA Transmittal of New Application 3 View
2005-05-03 SPEC Specification 19 View
2005-05-03 CLM Claims 5 View
2005-05-03 ABST Abstract 1 View
2005-05-03 DRW Drawings-only black and white line drawings 5 View
2005-05-03 OATH Oath or Declaration filed 3 View
2005-05-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-05-03 WFEE Fee Worksheet (SB06) 1 View
2005-05-03 WFEE Fee Worksheet (SB06) 1 View
2005-05-03 136A Authorization for Extension of Time all replies 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
11/120,929
Filed
2005-05-03
Pub. No.
US20060250588A1
Examiner
NGUYEN, HUNG
Art Unit
2851