Pressure sensor assembly
View Patent ↗A silicon-based high pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.
1. A sensor assembly comprising:
a ceramic substrate;
a container located on the ceramic substrate and having a flexible top surface configured to deflect under applied pressure, the container and the ceramic substrate defining a container volume;
a sensor cell mounted on the substrate and located within the container, the sensor cell comprising a sensor handle wafer and a diaphragm located proximate the sensor handle wafer, the sensor cell defining a reference cavity; and
a substantially incompressible liquid disposed within the container volume;
wherein the ceramic substrate defines a port for introducing the substantially incompressible liquid into the container volume.
2. The sensor assembly of claim 1 , wherein the substantially incompressible liquid comprises an oil selected from the group consisting of silicone, fluorinated oil, low-temperature oil, and a biocompatible oil.
3. The sensor assembly of claim 1 , wherein the container is formed from a material selected from the group consisting of stainless steel, aluminum, and alloy 42.
4. The sensor assembly of claim 1 , wherein the ceramic substrate is formed from a low temperature cofired ceramic (LTCC) material.
5. The sensor assembly of claim 1 , wherein the sensor comprises a general absolute pressure sensor.
6. The sensor assembly of claim 1 , wherein the sensor comprises a harsh media pressure sensor.
7. The sensor assembly of claim 1 , wherein the sensor comprises a differential pressure sensor.
8. The sensor assembly of claim 1 , wherein the container comprises a boss formed on the top surface of the container.
9. A pressure sensor arrangement comprising:
a ceramic substrate;
a container located on the ceramic substrate and having a flexible top surface configured to deflect under applied pressure and a boss formed on the top surface, the container and the ceramic substrate defining a container volume;
a silicon pressure sensor handle wafer mounted on the ceramic substrate and located within the container;
a silicon diaphragm located within the container volume and attached to the silicon pressure sensor handle wafer so as to define a reference cavity located between the silicon diaphragm and the silicon pressure sensor handle wafer; and
oil disposed within the container volume;
wherein the ceramic substrate defines a port for introducing the oil into the container volume.
10. The pressure sensor arrangement of claim 9 , wherein the oil is selected from the group consisting of silicone, fluorinated oil, low-temperature oil, and a biocompatible oil.
11. The pressure sensor arrangement of claim 9 , wherein the container is formed from a material selected from the group consisting of stainless steel, aluminum, and alloy 42.
12. The pressure sensor arrangement of claim 9 , wherein the ceramic substrate is formed from a low temperature cofired ceramic (LTCC) material.
13. The pressure sensor arrangement of claim 9 , wherein the silicon pressure sensor is configured to measure general absolute pressure.
14. The pressure sensor arrangement of claim 9 , wherein the sensor comprises a harsh media pressure sensor.
15. The pressure sensor arrangement of claim 9 , wherein the silicon pressure sensor is configured to measure a differential pressure.