IP Library Granted Patent US 7,271,523
Granted Patent B2
US 7,271,523 · App. 11/126,040 · Granted Sep 18, 2007

Closed loop mover assembly with measurement system

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Quick Facts
Patent No.
US 7,271,523
App. No.
11/126,040
Granted
Sep 18, 2007
Kind
B2
Abstract

A mover assembly ( 16 ) that moves or positions an object ( 12 ) includes a mover output ( 226 ), an actuator ( 230 ), and a measurement system ( 20 ). The mover output ( 226 ) is connected o the object ( 12 ), and the actuator ( 230 ) causes the mover output ( 226 ) to rotate about a first axis and move along the first axis. In this embodiment, the measurement system ( 20 ) directly measures the movement of the mover output ( 226 ) and provides feedback regarding the position of the mover output ( 226 ).

Claims (23)

1. A mover assembly that moves or positions an object, the mover assembly comprising:

a mover output that is coupled to the object;

an actuator that causes the mover output to rotate about a first axis and move along the first axis;

a measurement system that directly measures the movement of the mover output about the first axis; and

a control system that receives measurement information from the measurement system and performs positional correction on the measurement information to determine the position of the mover output along the first axis;

wherein the measurement system includes a first encoder component that is secured to the mover output and a second encoder component positioned adjacent to the first encoder component, the second encoder component moving concurrently with the mover output along the first axis.

2. The mover assembly of claim 1 wherein the position of the mover output at a number of locations along the first axis is mapped and calibrated.

3. The mover assembly of claim 1 wherein the actuator includes a pair of opposed jaw elements that engage the mover output and a piezoelectric element moves the jaw elements relative to each other, and wherein the measurement system measures the movement of the mover output about the first axis.

4. The mover assembly of claim 1 wherein the measurement system includes a first encoder component and a second encoder component positioned adjacent to the first encoder component, the first encoder component including a plurality of lines, and the second encoder component including an encoder head that measures encoder counts, and wherein an actual position of the mover output along the first axis is measured and compared to a measured encoder count.

5. The mover assembly of claim 1 wherein the measurement system includes a first encoder component and a second encoder component positioned adjacent to the first encoder component, the first encoder component including a plurality of lines, and the second encoder component including an encoder head that measures encoder counts, and wherein a plurality of alternative actual positions of the mover output along the first axis are measured and compared to a plurality of measured encoder counts.

6. The mover assembly of claim 1 wherein the control system uses a lookup table to provide positional correction.

7. The mover assembly of claim 1 wherein the mover output includes a threaded surface having a thread pitch and movement of the mover output along the first axis is calculated utilizing the thread pitch.

8. A precision apparatus including an object and the mover assembly of claim 1 .

9. A mover assembly that moves or positions an object, the mover assembly comprising:

a mover output that is coupled to the object;

an actuator that causes the mover output to rotate about a first axis and move along the first axis;

a rotary measurement system that directly measures rotary movement of the mover output about the first axis; and

a control system that uses measurement information from the rotary measurement system to determine the linear position of the mover output along the first axis; wherein the control system is calibrated by (i) sequentially moving the mover output with the actuator along the first axis and about the first axis to a plurality of different test positions, (ii) measuring a linear position of the mover output along the first axis at each of the plurality of different test positions, (iii) measuring a rotary position of the mover output about the first axis at each of the plurality of different test positions with the rotary measurement system; and (iv) associating the measured linear position of the mover output with the corresponding measured rotary position of the mover output at each of the different test positions, wherein the control system uses slope correction to determine the linear position of the mover output using the measured rotary position.

10. A mover assembly that moves or positions an object, the mover assembly comprising:

a mover output that is coupled to the object:

an actuator that causes the mover output to rotate about a first axis and move along the first axis;

a rotary measurement system that directly measures rotary movement of the mover output about the first axis; and

a control system that uses measurement information from the rotary measurement system to determine the linear position of the mover output along the first axis; wherein the control system is calibrated by (i) sequentially moving the mover output with the actuator along the first axis and about the first axis to a plurality of different test positions, (ii) measuring a linear position of the mover output along the first axis at each of the plurality of different test positions, (iii) measuring a rotary position of the mover output about the first axis at each of the plurality of different test positions with the rotary measurement system; and (iv) associating the measured linear position of the mover output with the corresponding measured rotary position of the mover output at each of the different test positions, wherein the control system uses curve fitting interpolation to determine the linear position of the mover output using the measured rotary position.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2012
From: ZIEGLER, ANDREW; ARNONE, DAVID F.; GREEN, EVAN DRAKE HARRIMAN
To: NEW FOCUS, INC.
Reel/Frame 027762/0274 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2012
From: BOOKHAM TECHNOLOGY PLC
To: NEWPORT CORPORATION
Reel/Frame 027690/0415 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 10, 2009
From: BOOKHAM TECHNOLOGY
To: NEWPORT CORPORATION
Reel/Frame 023498/0574 →