Substrate support method
View Patent ↗The present invention includes a method for supporting a substrate that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. To that end, the method includes disposing the substrate upon two spaced-apart bodies; and moving one of the two spaced-apart bodies away from the substrate.
1. A method of supporting a substrate, said method comprising:
disposing said substrate upon a pin cell, said a pin cell comprising a pin that provides a pair of spaced-apart contact lands that define a plane common to a plurality of pairs of spaced-apart contact lands provided by a plurality of pin cells; and
displacing a pin away from said substrate in response to an irregularity on said substrate.
2. The method as recited in claim 1 , wherein said disposing step is performed upon a plurality of pin cells.
3. The method as recited in claim 2 , wherein a longitudinal axis of each of said plurality of pin cells is oriented parallel to a longitudinal axes of each adjacent pin cell.
4. The method as recited in claim 2 , wherein a longitudinal axis of each of said plurality of pin cells is oriented randomly to a longitudinal axes of each adjacent pin cell.
5. The method as recited in claim 1 , wherein said disposing step is performed using a force provided by a vacuum.
6. The method as recited in claim 1 , wherein said disposing step is performed using an electrostatic force.
7. The method as recited in claim 1 , wherein said irregularity on said substrate is a surface contamination in a form of a particle.
8. The method as recited in claim 1 , wherein dimensions of said irregularity are substantially smaller than a height of said contact lands as measured from a nadir surface of said pin.
9. The method as recited in claim 1 , wherein said displacing step further comprises differentially displacing said pair of spaced-apart contact lands away from said substrate.
10. The method as recited in claim 9 , wherein said displacing step is performed in response to an unevenly distributed load being present on said pin cell.
11. The method as recited in claim 1 , wherein said displacing step further comprises rotating said pin away from said substrate.
12. The method as recited in claim 11 , wherein said displacing step is performed in response to an unevenly distributed load being present on said pin cell.
13. The method as recited in claim 11 , wherein said rotating is performed about a remote center of compliance that lies in said pin cell but does not lie on said pin.
14. The method as recited in claim 11 , wherein as a result of said displacing step, a surface of said substrate remains common to said plane common to said plurality of pairs of spaced-apart contact lands provided by said plurality of pin cells.