Elastic wave apparatus
View Patent ↗A surface acoustic wave apparatus is configured to avoid destruction from static electricity. The surface acoustic wave apparatus includes a piezoelectric substrate; a surface acoustic wave element having at least one interdigital electrode made up of a conductive film on the piezoelectric substrate; and a thin film electrically connected between terminals connecting to electrode fingers of the interdigital electrode, the thin film showing varistor characteristics formed on the piezoelectric substrate.
1. A surface acoustic wave apparatus comprising:
a piezoelectric substrate;
a surface acoustic wave element having at least one interdigital electrode made up of a conductive film on the piezoelectric substrate; and
a thin film electrically connected between terminals connecting to electrode fingers of the interdigital electrode, the thin film showing varistor characteristics formed on the piezoelectric substrate.
2. The surface acoustic wave apparatus according to claim 1 , wherein the thin film showing the varistor characteristics is formed in the region on the piezoelectric substrate except portions where the interdigital electrode is formed and portions where surface acoustic waves propagate.
3. The surface acoustic wave apparatus according to claim 2 , wherein the thin film showing the varistor characteristics has a film thickness of 1 μm to 100 μm.
4. The surface acoustic wave apparatus according to claim 2 , wherein the thin film showing the varistor characteristics is made up of semiconductor ceramics such as a zinc oxide or a strontium titanate to which a minute amount of an addition agent is added and which has a crystal grain diameter of 1 μm to 50 μm.
5. The surface acoustic wave apparatus according to claim 2 , wherein the thin film showing the varistor characteristics is formed at a room temperature by the aerosol deposition method which accelerates and causes micro powders of the material showing the varistor characteristics to collide against a substrate placed in reduced-pressure atmosphere.
6. The surface acoustic wave apparatus according to claim 1 , wherein the thin film showing the varistor characteristics has a film thickness of 1 μm to 100 μm.
7. The surface acoustic wave apparatus according to claim 1 , wherein the thin film showing the varistor characteristics is formed at a room temperature by the aerosol deposition method which accelerates and causes micro powders of the material showing the varistor characteristics to collide against a substrate placed in reduced-pressure atmosphere.
8. The surface acoustic wave apparatus according to claim 1 , wherein the thin film showing the varistor characteristics is made up of semiconductor ceramics such as a zinc oxide or a strontium titanate to which a minute amount of an addition agent is added and which has a crystal grain diameter of 1 μm to 50 μm.
9. The A surface acoustic wave apparatus according to claim 1 , wherein the thin film showing varistor characteristics is electrically connected on one side between the terminals connecting to electrode fingers of the interdigital electrode, and on the other side opposite to the one side, an electric pattern is formed, at least a part of which is facing to the terminals.
10. A elastic acoustic wave apparatus comprising:
a substrate having a cavity region excavated by anisotropic etching in the direction of thickness;
a film bulk acoustic resonator disposed at a position corresponding to the cavity region of the substrate;
a thin film showing varistor characteristics formed on the substrate, the thin film electrically connected between terminals of the film bulk acoustic resonator.
11. A surface acoustic wave apparatus comprising:
a surface acoustic wave chip wherein a surface acoustic wave element having at least one interdigital electrode made up of a conductive film is formed on a piezoelectric substrate; and
a package base substrate having a terminal electrode connected via a bump to a terminal electrode of the surface acoustic wave chip formed on the piezoelectric substrate, wherein
on the package base substrate, a thin film showing the varistor characteristics is formed, which is electrically connected between electrode fingers of the interdigital electrode.
12. The surface acoustic wave apparatus according to claim 11 , wherein the thin film showing the varistor characteristics is formed on a top surface or an under surface of the package base substrate or within the substrate.
13. The A surface acoustic wave apparatus according to claim 11 , wherein the thin film showing varistor characteristics is electrically connected on one side between the terminals connecting to electrode fingers of the interdigital electrode, and on the other side opposite to the one side, an electric pattern is formed, at least a part of which is facing to the terminals.