Wavelength converting element and method of manufacturing thereof
View Patent ↗A wavelength converting element is provided in which a fundamental wave with respect to an optical crystal substrate and a peak of a vertical transverse mode of a second harmonic are made to coincide, the converting efficiency is good, and a beam shape which enables good joining to a lens or an optical fiber is obtained. Given that an angle formed by a surface of the optical crystal substrate and a C axis of the optical crystal substrate is θ, a period at which inverted domains are formed is p, and a distance from a distal end of a comb-shaped electrode for forming the inverted domain to a central position of a waveguide is G, in the ion implantation, a concentration peak of the ion implantation is formed at a distance of substantially (G·tan θ+p/4) from the surface of the optical crystal substrate.
1. A wavelength converting element comprising:
an optical crystal substrate whose C axis is inclined with respect to the substrate surface;
inverted domains formed at an interior of the optical crystal substrate; and
a waveguide which is formed by proton implantation and which intersects the inverted domains, wherein the substrate surface is a surface where reversal electrodes are disposed.
2. A wavelength converting element of claim 1 , wherein the substrate surface is a top surface.
3. A method of manufacturing a wavelength converting element comprising a step of forming a waveguide by carrying out proton implantation after inverted domains have been formed at an interior of an optical crystal substrate whose C axis is inclined with respect to the substrate surface, wherein the substrate surface is a surface where reversal electrodes are disposed.
4. A method of manufacturing a wavelength converting element according to claim 3 , wherein the substrate surface is a top surface.
5. A method of manufacturing a wavelength converting element comprising a step of forming inverted domains after a waveguide has been formed at an interior of an optical crystal substrate whose C axis is inclined with respect to the substrate surface by carrying out ion implantation, wherein the substrate surface is a surface where reversal electrodes are disposed.
6. A method of manufacturing a wavelength converting element according to claim 5 , wherein in the ion implantation, protons are implanted.
7. A method of manufacturing a wavelength converting element according to claim 5 , wherein the substrate surface is a top surface.