High power, long focus electron source for beam processing
View Patent ↗Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.
1. Apparatus for beam processing comprising:
a high power, long focus electron source for generating an e-beam; said high power, long focus electron source for generating an e-beam including an RF electron gun having a planar focusing cathode for providing a focused electron beam having a selected dielectric material for providing an electron beam emission surface; said electron beam emission surface including a substantially flat surface; a first metal surface behind said dielectric material; a second metal surface radially surrounding said dielectric material; said first metal surface and said second metal surface for shaping electric fields that accelerate and guide an electron beam from the electron beam emission surface; and said dielectric material being penetrated by electric fields and allowing the planar focusing cathode to provide focusing of said electron beam starting at said substantially flat surface of the cathode dielectric material;
a series of steering magnets transporting the e-beam for steering the e-beam and at least one refocusing magnet for refocusing the e-beam; and
a final steering magnet for bending the e-beam to focus on a target.
2. Apparatus for beam processing as recited in claim 1 wherein selected dielectric material includes a ceramic material; and said selected dielectric material functions as a cathode of a high brightness RF electron gun and provides focusing of the e-beam.
3. Apparatus for beam processing as recited in claim 1 wherein said series of steering magnets include a series of dipole magnets arranged to steer the e-beam.
4. Apparatus for beam processing as recited in claim 1 wherein said at least one refocusing magnet to refocus the e-beam includes at least one quadrupole magnet arranged to refocus the e-beam.
5. Apparatus for beam processing as recited in claim 1 wherein said final steering magnet for bending the e-beam to focus on a target includes a dipole magnet arranged to bend the e-beam to focus on a target.
6. Apparatus for beam processing as recited in claim 1 wherein said target includes an e-beam welding target.
7. Apparatus for beam processing as recited in claim 1 wherein said target includes an e-beam evaporation target for thin film deposition.