IP Library › Granted Patent US 7,442,317
Granted Patent B2
US 7,442,317 · App. 11/144,844 · Granted Oct 28, 2008

Method of forming a nozzle rim

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Quick Facts
Patent No.
US 7,442,317
App. No.
11/144,844
Granted
Oct 28, 2008
Kind
B2
Abstract

A method of forming a nozzle rim for a nozzle aperture is provided. The method is suitable for forming part of a printhead fabrication process. The method comprises the steps of: (a) depositing a roof material layer over a sacrificial layer; and (b) removing a first part of said roof material layer so as to form a nozzle rim.

Claims (11)

1. A method of forming a nozzle rim for a nozzle aperture, as part of a printhead fabrication process, said method comprising the steps of:

(a) depositing a roof material layer over a sacrificial layer; and

(b) removing a first part of said roof material layer so as to form a nozzle rim.

2. The method of claim 1 further comprising the step of removing a second part of said roof material layer so as to form a nozzle aperture.

3. The method of claim 2 , wherein removal of said second part is performed either prior to or subsequent to removal of said first part.

4. The method of claim 1 , wherein said removal is an etching process.

5. The method of claim 1 , wherein said roof material layer comprises TEOS glass.

6. The method of claim 1 , wherein said roof material layer comprises silicon nitride.

7. The method of claim 1 , wherein said roof material layer comprises titanium nitride.

8. The method of claim 1 , wherein said roof material layer is deposited by a CVD process.

9. The method of claim 8 , wherein said process is a plasma-enhanced (PECVD) process.

Assignments (2)
CHANGE OF NAME Recorded Jun 25, 2014
From: ZAMTEC LIMITED
To: MEMJET TECHNOLOGY LIMITED
Reel/Frame 033244/0276 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 17, 2012
From: SILVERBROOK RESEARCH PTY. LIMITED AND CLAMATE PTY LIMITED
To: ZAMTEC LIMITED
Reel/Frame 028569/0704 →