Semiconductor device having a particular electrode structure
View Patent ↗In order to inhibit the connection failure due to the degradation of the connection interface strength of the electrode pad and the warp thereof in the semiconductor device having an electrode pad, a metal layer formed on the electrode pad, and a metal bump formed on the metal layer, in the present invention, gold (Au) is contained in the metal layer, the metal bump is made of solder mainly made of Sn and designed to have an average height H of 100 μm or less per unit area in the electrode pad, and the concentration of Au of the metal layer dissolved in the solder is set to 1.3×10 −3 (Vol %) or less. More preferably, the metal bump contains palladium (Pd), and the solder coating for forming the metal bump on the electrode pad is performed by using the dipping and the paste printing in combination.
1. A semiconductor device, comprising: an electrode pad, a metal layer formed on said electrode pad, and a metal bump formed on said metal layer,
wherein said metal layer contains Au,
said metal bump has an average bump height in one electrode pad per unit area of 100 μm or less and is made of solder mainly made of Sn,
a concentration of Au of said metal layer dissolved in the solder of said metal bump is 1.3×10 −3 (Vol %) or less,
said metal layer contains Pd in addition to Au, and
said metal bump is characterized in that compound formed by reacting Pd of said metal layer formed on said electrode pad before connecting said metal bump with said metal bump is not present in a row within a range of 2 to 20 μm from the interface between said metal bump and the electrode pad on which said metal bump is connected.
2. The semiconductor device according to claim 1 , further comprising:
a substrate provided with said electrode pad and a semiconductor chip mounted on said substrate,
wherein said metal bump formed on said electrode pad functions as an external terminal.
3. The semiconductor device according to claim 1 , further comprising:
a semiconductor chip on which said electrode pad is provided,
wherein said metal bump formed on said electrode pad functions as an external terminal.
4. A semiconductor device comprising: an electrode pad, a metal layer formed on said electrode pad, and a metal bump formed on said metal layer,
wherein said metal layer contains Au,
said metal bump has an average bump height in one electrode pad oer unit area of 100 μm or less and is made of solder mainly made of Sn,
a concentration of Au of said metal layer dissolved in the solder of said metal bump is 1.3×10 −3 (Vol %) or less, said metal layer contains Pd in addition to Au, and
said metal bump is characterized in that, after a stretch of time under the high-temperature condition of highest temperature of 212 to 217° C. and retention time at 198° C. or higher of 42 seconds, compound formed by reacting Au of said metal layer formed on said electrode pad before connecting said metal bump with said metal bump is not present in a row within a range of 2 to 20 μm from the interface between said metal bump and said electrode pad on which said metal bump is connected.
5. The semiconductor device according to claim 4 , further comprising:
a substrate provided with said electrode pad and a semiconductor chip mounted on said substrate,
wherein said metal bump formed on said electrode pad functions as an external terminal.
6. The semiconductor device according to claim 4 , further comprising:
a semiconductor chip on which said electrode pad is provided,
wherein said metal bump formed on said electrode pad functions as an external terminal.
7. The semiconductor device according to claim 4 , wherein said metal layer contains Pd in addition to Au.