Fabrication of self-aligned reflective/protective overlays on magnetoresistance sensors
View Patent ↗A magnetoresistance sensor is fabricated using a sensor structure including a free layer deposited upon a lower layered structure and depositing an oxide structure overlying the free layer. The depositing of the oxide structure includes the steps of depositing a buffer layer overlying the free layer, wherein the buffer layer is a buffer-layer metal when deposited, depositing an overlayer overlying and contacting the buffer layer, the overlayer being an overlayer metallic oxide of an overlayer metal, and oxidizing the buffer layer to form a buffer layer metallic oxide.
1. A method for fabricating a magnetoresistive sensor, comprising the steps of
providing a giant magnetoresistive sensor structure including a free layer deposited upon a lower layered structure; and
depositing an oxide structure overlying the free layer and having a thickness of not less than about 25 Angstroms, the step of depositing an oxide structure including the steps of
depositing a buffer layer overlying the free layer, the buffer layer being a buffer-layer metal selected from the group consisting of tantalum, aluminum, titanium, zirconium, hafnium, yttrium, chromium, magnesium and silicon when deposited and having a thickness of not less than about 5 Angstroms, thereafter
depositing an overlayer overlying and contacting the buffer layer, the overlayer being an overlayer metallic oxide of an overlayer metal, and simultaneously oxidizing the buffer layer to form a buffer layer metallic oxide.
2. A method for fabricating a magnetoresistive sensor, comprising the steps of
providing a giant magnetoresistive sensor structure including a free layer deposited upon a lower layered structure; and
depositing an oxide structure overlying the free layer and having thickness of not less than about 25 Angstroms, the step of depositing an oxide structure including the steps of
depositing a buffer layer overlying the free layer, the buffer layer being buffer-layer when deposited and having a thickness of not less than about 5 Angstroms, thereafter
depositing an overlayer and contacting the buffer layer, the overlayer being an overlayer metallic oxide of an overlayer metal that is the same as the buffer layer metal, and simultaneously oxidizing the buffer layer to form a buffer layer metallic oxide.
3. A method for fabricating a magnetoresistive sensor, comprising the steps of
providing a giant magnetoresistive sensor structure including a free layer deposited upon a lower layered structure; and
depositing an oxide structure overlying the free layer and having a thickness of not less than about 25 Angstroms, the step of depositing an oxide structure including the steps of
depositing a buffer layer overlying the free layer, the buffer layer being a buffer-layer metal when deposited and having a thickness of not less than about 5 Angstroms, thereafter
depositing an overlayer overlying and contacting the buffer layer, the overlayer being overlayer metallic oxide of an overlayer metal, and simultaneously oxidizing the buffer layer to form a buffer layer metallic oxide, the oxidizing of the buffer layer being performed without oxidizing the free layer.