IP Library Granted Patent US 7,249,516
Granted Patent B2
US 7,249,516 · App. 11/146,721 · Granted Jul 31, 2007

Method of operating a resistive heat-loss pressure sensor

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Quick Facts
Patent No.
US 7,249,516
App. No.
11/146,721
Granted
Jul 31, 2007
Kind
B2
Abstract

In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.

Claims (31)

1. A heat loss gauge for measuring gas pressure in an environment comprising:

a resistive sensing element exposed to the environment;

a resistive compensating element in circuit with the sensing element and exposed to the environment;

an electrical source connected to switch current between the sensing element and compensating element, with current applied to the sensing element over a longer duty cycle relative to the current applied to the resistive compensating element to heat the sensing element relative to the compensating element; and

measuring circuitry for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

2. The gauge of claim 1 wherein the current to the sensing and compensating element is switched from a common current source.

3. The gauge of claim 1 wherein the gas pressure is determined based on heating current through the sensing element and/or resulting voltage across the sensing element.

4. The gauge of claim 1 wherein the compensating element is in series with a fixed resistive element.

5. The gauge of claim 4 wherein the electrical source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.

6. The gauge of claim 4 wherein a voltage across the compensating element and fixed resistive element is compared to a voltage across the sensing element to control the switched current.

7. The gauge of claim 4 wherein the fixed resistive element is in series with both the sensing element and the compensating element and a voltage across the fixed resistive element is added to a voltage across the compensating element and fixed resistive element for comparison to a voltage across the sensing element and fixed resistive element to control the switched current.

8. The gauge of claim 1 wherein the electrical source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element plus a fixed resistance.

9. The gauge of claim 1 wherein current is applied to the sensing element and compensating element at fixed duty cycles and current level is controlled.

10. The gauge of claim 1 wherein the applied current is fixed and duty cycle of current to at least one of the sensing element and compensating element is controlled.

11. The gauge of claim 1 wherein both applied current and duty cycle of at least one of the sensing element and compensating element are controlled.

12. A method of measuring gas pressure in an environment comprising:

switching current between a resistive sensing element and a resistive compensating element exposed to the environment, the current being applied to the sensing element over a longer duty cycle relative to the current applied to the resistive compensating element to heat the sensing element relative to the compensating element; and

determining gas pressure in the environment based on electrical response of the sensing element and the compensating element.

13. The method of claim 12 wherein the current to the sensing and compensating element is switched from a common current source.

14. The method of claim 12 wherein the gas pressure is determined based on heating current through the sensing element and/or resulting voltage across the sensing element.

15. The method of claim 12 wherein the compensating element is in series with a fixed resistive element.

16. The method of claim 15 wherein the electrical source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.

17. The method of claim 15 wherein a voltage across the compensating element and fixed resistive element is compared to a voltage across the sensing element to control the switched current.

18. The method of claim 15 wherein the fixed resistive element is in series with both the sensing element and the compensating element and the voltage across the fixed resistive element is added to the voltage across the compensating element and fixed resistive element for comparison to the voltage across the sensing element and fixed resistive element to control the switched circuit.

19. The method of claim 12 wherein the electrical source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element plus a fixed resistance.

20. The method of claim 12 wherein current is applied to the sensing element and compensating element at fixed duty cycles and current level is controlled.

21. The method of claim 12 wherein the applied current is fixed and duty cycle of current to at least one of the sensing element and compensating element is controlled.

22. The method of claim 12 wherein both applied current and duty cycle of at least one of the sensing element and compensating element are controlled.

23. A heat loss gauge for measuring gas pressure in an environment comprising:

means for switching current between a resistive sensing element and a resistive compensating element exposed to the environment, the current being applied to the sensing element over a longer duty cycle relative to the current being applied to the resistive compensating element to heat the sensing element relative to the compensating element; and

processing means for determining gas pressure in the environment based on electrical response of the sensing element and the compensating element.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
CORRECTIVE ASSIGNMENT TO CORRECT THE STATE OF INCORPORATION INSIDE ASSIGNMENT PREVIOUSLY RECORDED AT REEL: 033190 FRAME: 0755. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Oct 10, 2014
From: BROOKS AUTOMATION, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 033958/0363 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2014
From: BROOKS AUTOMATION, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 033190/0755 →