Film-forming composition, insulating material-forming composition, insulating film and electronic device
View Patent ↗A film-forming composition comprising: a compound having a specific cage structure; a pore-forming agent; an adhesion promoter; and so on, an insulating film formed from the film-forming composition and an electronic device comprising the insulating film.
1. A film-forming composition comprising:
a compound having a cage structure; and
an organic solvent,
wherein a ratio of all carbon atoms of the cage structure to all carbon atoms of a total solid content of the film-forming composition is 50-95% and wherein the compound having a cage structure is a polymer of at least one compound represented by formula (I):
wherein R represents a hydrogen atom, an alkyl group having from 1 to 10 carbon atoms, an alkenyl group having from 2 to 10 carbon atoms, an alkynyl group having from 2 to 10 carbon atoms, an aryl group having from 6 to 20 carbon atoms or a silyl group having from 0 to 20 carbon atoms;
m represents an integer of from 1 to 14;
X represents a halogen atom, an alkyl group having from 1 to 10 carbon atoms, an alkenyl group having from 2 to 10 carbon atoms, an aryl group having from 6 to 20 carbon atoms or a silyl group having from 0 to 20 carbon atoms; and
n represents an integer of from 0 to 13.
2. The film-forming composition according to claim 1 ,
wherein, in formula (I), R is a hydrogen atom or an alkyl group having from 1 to 10 carbon atoms, m=1 to 3 and n=0.
3. The film-forming composition according to claim 1 , wherein the compound having a cage structure does not have a nitrogen atom.
4. An insulating film formed from a film-forming composition according to claim 1 .
5. An electronic device comprising an insulating film formed from a film-forming composition according to claim 1 .