Organic thin film transistor with stacked organic and inorganic layers
View Patent ↗The present invention provides an organic thin film transistor and method for fabricating the same. The organic thin film transistor has a substrate and a gate electrode that is positioned on the substrate. A gate insulator has a stacked structure comprising an inorganic gate insulator and an organic gate insulator that are positioned on the gate electrode. An organic semiconductor layer is positioned on the gate insulator to overlap the gate electrode. Accordingly, an organic thin film transistor that has flexibility, decreased leakage current, and a low threshold is formed.
1. An organic thin film transistor (OTFT), comprising:
a substrate;
a gate electrode that is positioned on the substrate;
a gate insulator that is positioned on the gate electrode and has a stacked structure comprising an inorganic gate insulator and an organic gate insulator; and
an organic semiconductor layer that overlaps the gate electrode on the gate insulator,
wherein the organic gate insulator is arranged on an entire surface of the substrate and encapsulates the inorganic gate insulator,
wherein the organic gate insulator is disposed directly on the inorganic gate insulator and directly on the gate electrode,
wherein the organic gate insulator has a uniform thickness greater than a thickness of the inorganic gate insulator, and
wherein the thickness of the organic gate insulator is between 3000 Å to 10000 Å.
2. The OTFT of claim 1 ,
wherein the inorganic gate insulator comprises at least one layer selected from a group consisting of a silicon oxide layer, a silicon nitride layer, and a silicon oxynitride layer.
3. The OTFT of claim 1 ,
wherein the inorganic gate insulator comprises a metal oxide layer.
4. The OTFT of claim 3 ,
wherein the metal oxide layer comprises at least one layer selected from a group consisting of an aluminum oxide layer, an yttrium oxide layer, a zinc oxide layer, a hafnium oxide layer, a zirconium oxide layer, a tantalum oxide layer, and a titanium oxide layer.
5. The OTFT of claim 1 ,
wherein the inorganic gate insulator comprises a ferroelectric insulator.
6. The OTFT of claim 5 ,
wherein the ferroelectric insulator comprises at least one material selected from a group consisting of a PbZ x Ti 1-x O 3 (PZT) layer, a Bi 4 Ti 3 O 12 layer, a BaMgF 4 layer, and a Ba x Sr 1-x TiO 3 (BST) layer.
7. The OTFT of claim 1 ,
wherein the inorganic gate insulator comprises an oxide layer of the gate electrode.
8. The OTFT of claim 7 ,
wherein the gate electrode comprises at least one material selected from a group consisting of aluminum, yttrium, zinc, hafnium, zirconium, tantalum, titanium, and an alloy thereof.
9. The OTFT of claim 8 ,
wherein the gate electrode comprises an aluminum-molybdenum alloy layer or a titanium layer.
10. The OTFT of claim 1 ,
wherein the thickness of the inorganic gate insulator is between 100 Å to 3000 Å.
11. The OTFT of claim 1 ,
wherein the wherein the organic gate insulator comprises at least one material selected from a group consisting of a vinyl-based polymer, a styrene-based polymer, an acrylic-based polymer, an epoxy-based polymer, an ester-based polymer, a phenol-based polymer, an imide-based polymer, and cycloalkane.
12. The OTFT of claim 11 ,
wherein the organic gate insulator comprises at least one material selected from a group consisting of polyethylene, polypropylene, poly(tetrafluoro ethylene), poly(vinyl chloride), poly(vinyl alchol), poly(vinyl pyrrolidone), polystyrene, polyacrylate, poly(methylmethacrylate), poly(acrylonitrile), polycarbonate, poly(ethylene terephthalate), parylene, poly(phenylene sulfide), polyimide, benzocyclobutene, and cyclopentene.
13. The OTFT of claim 1 ,
wherein the inorganic gate insulator is positioned on a top surface of the gate electrode, and the organic gate insulator is positioned on the inorganic gate insulator.
14. The OTFT of claim 13 ,
wherein the inorganic gate insulator covers the gate electrode.
15. The OTFT of claim 14 ,
wherein the inorganic gate insulator comprises an oxide layer of the gate electrode.
16. The OTFT of claim 1 ,
wherein the substrate comprises a material selected from a group consisting of a glass, a plastic, a sapphire, and quartz.
17. The OTFT of claim 1 ,
wherein the organic semiconductor layer comprises at least one material selected from a group consisting of polyacetylene, polythiophene, P3HT(poly(3-hexylthiophene-2,5-diyl)), F8T2(poly(9,9′-dioctylfluorene-co-bithiophene)), PTV(poly(thienylene vinylene)), pentacene, tetracene, rubrene, and α-6T(alpha-hexathienylene).
18. The OTFT of claim 1 , further comprising:
a source electrode; and
a drain electrode;
wherein the source electrode and drain electrode are positioned between an end of the gate electrode and an end of the organic semiconductor layer to be coupled to the organic semiconductor layer.
19. The OTFT of claim 1 , further comprising a source electrode and a drain electrode disposed directly on the organic gate insulator.
20. The OTFT of claim 19 , wherein the organic semiconductor layer is arranged on a side surface and a top surface of at least one of the source electrode and the drain electrode.
21. An organic thin film transistor (OTFT), comprising:
a substrate;
a gate electrode positioned on the substrate;
an inorganic gate insulator positioned on the gate electrode;
an organic gate insulator positioned on the inorganic gate insulator; and
an organic semiconductor layer overlapping the gate electrode on the organic gate insulator,
wherein the inorganic gate insulator comprises an oxide layer of the gate electrode,
wherein the organic gate insulator is arranged on an entire surface of the substrate and encapsulates the inorganic gate insulator,
wherein the organic gate insulator is disposed directly on the inorganic gate insulator and directly on the gate electrode,
wherein the organic gate insulator has a uniform thickness greater than a thickness of the inorganic gate insulator, and
wherein the thickness of the organic gate insulator is between 3000 Å to 10000 Å.
22. The OTFT of claim 21 ,
wherein the gate electrode comprises at least one material selected from a group consisting of aluminum, yttrium, zinc, hafnium, zirconium, tantalum, titanium, and an alloy thereof.
23. The OTFT of claim 22 ,
wherein the gate electrode comprises an aluminum-molybdenum alloy layer or a titanium layer.
24. The OTFT of claim 21 ,
wherein the thickness of the inorganic gate insulator is between 100 Å to 3000 Å.
25. The OTFT of claim 21 ,
wherein the organic gate insulator comprises at least one material selected from a group consisting of a vinyl-based polymer, a styrene-based polymer, an acrylic-based polymer, an epoxy-based polymer, an ester-based polymer, a phenol-based polymer, an imide-based polymer, and cycloalkane.
26. The OTFT of claim 25 ,
wherein the organic gate insulator is at least one material layer selected from a group consisting of polyethylene, polypropylene, poly(tetrafluoro ethylene), poly(vinyl chloride), poly(vinyl alchol), poly(vinyl pyrrolidone), polystyrene, polyacrylate, poly(methylmethacrylate), poly(acrylonitrile), polycarbonate, poly(ethylene terephthalate), parylene, poly(phenylene sulfide), polyimide, benzocyclobutene, and cyclopentene.
27. The OTFT of claim 21 , further comprising a source electrode and a drain electrode disposed directly on the organic gate insulator.
28. The OTFT of claim 27 , wherein the organic semiconductor layer is arranged on a side surface and a top surface of at least one of the source electrode and the drain electrode.