Pad structure of liquid crystal display device and fabrication method thereof
View Patent ↗A pad structure of a liquid crystal display (LCD) device and a fabrication method thereof are provided. The pad structure of the LCD device includes: a bottom electrode formed with a predetermined area at one edge side of each of signal lines formed on an array substrate; an insulation layer formed over the bottom electrode; a contact hole for exposing the bottom electrode, the contact hole formed as a predetermined portion of the insulation layer is etched; and a terminal electrode formed over the contact hole, thereby being connected with the bottom electrode, wherein the bottom electrode is formed in a dual structure including an aluminum alloy layer using AlNd and a molybdenum (Mo) layer and a thickness of the Mo layer is greater than at least about one quarter of the thickness of the aluminum alloy layer formed beneath the Mo layer.
1. A method for fabricating a liquid crystal display (LCD) device, comprising:
providing a first substrate and a second substrate;
forming a pad structure on one of said first and second substrates;
said forming a pad structure comprising:
forming a bottom electrode with a predetermined area at one edge side of each of signal lines formed on said substrate;
forming a gate insulation layer and an insulation layer over the bottom electrode, the insulation layer formed of an organic insulation material;
etching a predetermined portion of the gate insulation layer and the insulation layer to form a contact hole for exposing the bottom electrode, wherein forming the contact hole consecutively performs an ashing process to the gate insulation layer and the insulation layer, after the etching process of the gate insulation layer and the insulation layer, to decrease a slope of the contact hole; and
forming a terminal electrode over the sloped contact hole such that the terminal electrode is connected with the exposed bottom electrode,
wherein forming the bottom electrode is in a dual structure including an aluminum alloy layer and a molybdenum (Mo) layer and a thickness of the Mo layer is greater than at least about one quarter of the thickness of the aluminum alloy layer formed beneath the Mo layer, said forming the bottom electrode comprising:
forming the aluminum alloy layer,
forming the molybdenum (Mo) layer on the aluminum alloy layer,
forming photoresist pattern on the molybdenum (Mo) layer,
performing a wet etching process, and patterning the molybdenum (Mo) layer and the aluminum alloy layer;
performing a dry etching process for the photoresist pattern, the molybdenum (Mo) layer and the aluminum alloy layer to remove a portion of the molybdenum (Mo) layer on a boundary region of the molybdenum (Mo) layer, and
removing the photoresist pattern,
wherein a groove in the molybdenum (Mo) layer is formed by an over-etching in the step of etching to form the contact hole,
wherein one part of the terminal electrode is disposed in the groove.
2. The method as claimed in claim 1 , wherein said etching of the gate insulation layer and the insulation layer to form the contact hole is concurrently performed.