Method of manufacturing an AMOLED

1. A method of manufacturing an active matrix organic light-emitting diode, the method comprising:

providing a substructure;

forming at least a TFT on the substructure;

forming an inter-layer dielectric on the TFT and the substructure;

forming a plurality of via holes on the ILD, each via hole reaching a source and a drain of the TFT;

forming a metal layer on each via hole, the metal layer electrically contacting the source and the drain;

after forming the metal layer, forming a transparent electrode on the metal layer surface electrically contacting the drain;

forming a pixel define layer on the transparent electrode and the ILD; and

after forming the transparent electrode, forming a light-emitting diode on the transparent electrode.

2. The method of claim 1 , wherein the substructure comprises one of a transparent glass substructure, a flexible plastic substrate, and metal foil.

3. The method of claim 1 , wherein the TFT is a low temperature polycrystalline silicon TFT and the method of forming the LTPS TFT comprises:

forming a buffer insulator layer on the substructure;

forming an active layer on the buffer insulator layer surface;

forming a gate insulator layer on the active layer and the buffer insulator layer;

forming a gate metal on the gate insulator layer, the gate metal being formed on a central portion of the active layer; and

performing a self aligned procedure with the gate metal to perform ion doping on the active layer and to form the source and the drain on the corresponding sides of the gate metal.

4. The method of claim 3 , wherein the method of forming the active layer further comprises:

forming an amorphous silicon film on the buffer insulator layer;

re-crystallizing the amorphous silicon film to form a poly-crystal silicon; and

performing a first photolithograph process on the polycrystalline silicon to form the active layer.

5. The method of claim 3 , wherein the method of forming the gate metal further comprises:

forming a first metal film on the gate insulator layer; and

performing a second PEP on the first metal film to form the gate metal.

6. The method of claim 1 , wherein the via hole of the ILD is formed by a third PEP.

7. The method of claim 1 , wherein the ILD is formed by a spin silica on glass process.

8. The method of claim 1 , wherein the ILD is sensitization material.

9. The method of claim 1 , wherein the method of forming the metal layer further comprises:

forming a second metal film on the ILD; and

performing a fourth PEP on the second metal film to form the metal layer electrically contacting the source and the drain.

10. The method of claim 9 , wherein the method of forming the transparent electrode and the pixel define layer further comprises:

forming a transparent electrode film on the ILD and the metal layer;

performing a fifth PEP on the transparent electrode to form the transparent electrode; and

forming the pixel define layer by a etching process and a sixth PEP.

11. The method of claim 10 , wherein the transparent electrode cover is wider than the metal layer electrically contacting the drain, and the AMOLED is a bottom emission LED panel and an upper and lower emission organic light-emitting diode.

12. The method of claim 10 , wherein the pixel define layer is formed by a spin silica on glass process.

13. A method of manufacturing an active matrix organic light-emitting diode, the method comprising:

providing a substructure;

forming at least a TFT on the substructure;

forming an inter-layer dielectric on the TFT and the substructure;

forming a plurality of via holes on ILD, each via hole reaching a source and a drain of the TFT;

forming a metal layer and a transparent electrode layer on each via hole, the metal layer and the transparent is electrode layer having the same pattern and electrically contacting the source and the drain individually;

forming a pixel define layer on the transparent electrode layer and the ILD; and

after forming the transparent electrode, forming a light-emitting diode on the transparent electrode layer.

14. The method of claim 13 , wherein the TFT is a low temperature polycrystailine silicon TFT and the method of forming the LTPS TFT comprises:

forming a buffer insulator layer on the substructure;

forming an active layer on the buffer insulator layer surface;

forming a gate insulator layer on the active layer and the buffer insulator layer;

forming a gate metal on the gate insulator layer, the gate metal being formed on a central portion of the active layer; and

performing a self aligned procedure with the gate metal to perform ion doping on the active layer and to form the source and the drain on the corresponding sides of the gate metal.

15. The method of claim 14 , wherein the method of forming the active layer further comprises:

forming an amorphous silicon film on the buffer insulator layer;

re-crystallizing the amorphous silicon film to form a poly-crystal silicon; and

performing a first photolithograph process on the polycrystalline silicon to form the active layer.

16. The method of claim 14 , wherein the method of forming the gate metal further comprises:

forming a first metal film on the gate insulator layer; and

performing a second PEP on the first metal film to form the gate metal.

17. The method of claim 13 , wherein the via hole of the ILD is formed by a third PEP.

18. The method of claim 13 , wherein the ILD is formed by a spin silica on glass process.

19. The method of claim 13 , wherein the ILD is sensitization material.

20. The method of claim 13 , wherein the method of forming the same pattern of the metal layer and the transparent electrode layer further comprises:

forming a second metal film and a transparent electrode film on the ILD; and

performing a fourth PEP on the second metal film.

21. The method of claim 20 , wherein the pixel define layer is formed by an etching process and a fifth PEP.

22. The method of claim 21 , wherein the pixel define layer is formed by a spin silica on glass process.

23. The method of claim 22 , wherein the AMOLED is a top emission LED panel.