Array substrate for a transflective liquid crystal display device and fabricating method thereof
View Patent ↗A fabricating method of an array substrate for a transflective liquid crystal display device includes: forming a gate electrode and a gate line on the substrate; depositing a first insulating layer on the gate electrode and the gate line; forming an active layer on the first insulating layer over the gate electrode; forming an ohmic contact layer on the active layer; forming source and drain electrodes on the ohmic contact layer, and a data line connected to the source electrode, the data line defining a pixel region with the gate line; depositing a second insulating layer on the source and drain electrodes, and the data line, the second insulating layer having an inorganic material; forming a reflective plate on the second insulating layer at the pixel region, the reflective plate having a transmissive hole; forming a third insulating layer on the reflective plate; and forming a pixel electrode on the third insulating layer at the pixel region, the pixel electrode being transparent and connected to the drain electrode.
1. A fabricating method of an array substrate for a transflective liquid crystal display device, comprising:
forming a gate electrode and a gate line on the substrate;
depositing a first insulating layer on the gate electrode and the gate line;
forming an active layer on the first insulating layer over the gate electrode;
forming an ohmic contact layer on the active layer;
forming source and drain electrodes on the ohmic contact layer, and a data line connected to the source electrode, the data line defining a pixel region with the gate line;
depositing a second insulating layer on the source and drain electrodes, and the data line, the second insulating layer having an inorganic material;
forming a reflection layer on the second insulating layer and a photoresist layer on the reflection layer;
forming a reflective plate on the second insulating layer at the pixel region, by etching the reflection layer by using the photoresist layer as a first etching mask, the reflective plate having a transmissive hole, wherein the photoresist layer remains after forming the reflective plate;
etching the second insulating layer by using the photoresist layer and the reflective plate as a second etching mask;
removing the photoresist layer after etching the second insulating layer;
forming a third insulating layer on the reflective plate; and
forming a pixel electrode on the third insulating layer at the pixel region, the pixel electrode being transparent and connected to the drain electrode.
2. The method according to claim 1 , wherein etching the second insulating layers is performed in a dry etching method.
3. The method according to claim 2 , wherein etching the second insulating layers is performed partially.
4. The method according to claim 2 , wherein etching the second insulating layers is performed fully.
5. The method according to claim 1 , further comprising etching the first, second and third insulating layers to have a groove corresponding to the transmissive hole in common.
6. The method according to claim 1 , wherein the second insulating layer has one of an inorganic insulating material group including silicon nitride and silicon oxide.
7. The method according to claim 1 , wherein the third insulating layer has one of an organic insulating material group including benzocyclobutene and acrylic resin.