Systems and methods for overcoming stiction
View Patent ↗An electromechanical system includes a structural plate in contact with a stop and an actuator activated by a force for creating a movement of the stop relative to the structural plate, wherein the movement is sufficient to overcome stiction forces between the structural plate and the stop.
1. An electro-mechanical system, the system comprising:
a base layer;
a structural plate in contact with a stop, wherein the structural plate is supported above the base layer by a pivot and the stop is disposed over the base layer; and
an actuator activated by a force for creating a movement of the stop relative to the structural plate, wherein the movement is sufficient to overcome stiction forces between the structural plate and the stop.
2. The system of claim 1 , wherein activating the actuator with a force causes the stop to displace from a static position to a displaced position, and wherein the movement results from elastic forces associated with the stop which cause the stop to displace from the displaced position to the static position when the actuator is de-activated.
3. The system of claim 2 , wherein the movement comprises an oscillation of the stop.
4. The system of claim 3 , wherein the oscillation comprises displacement of the stop from the displaced position passed the static position to an overshoot position and back to the static position.
5. The system of claim 1 , wherein the force comprises an alternating force having a frequency.
6. The system of claim 1 , wherein the alternating force is an AC voltage or a pulsed DC voltage.
7. The system of claim 5 , wherein the oscillation comprises a frequency at or about the frequency of the alternating force.
8. The system of claim 1 , the system further comprising a micro-mirror disposed on the structural plate.
9. The system of claim 1 , wherein the actuator is a first actuator, the system further comprising a second actuator, wherein application of a DC voltage to the second actuator cause the structural plate to displace and contact the stop.
10. The system of claim 1 , wherein the movement is primarily vertical relative to the base layer.
11. The system of claim 1 , wherein the movement is primarily horizontal relative to the base layer.
12. The system of claim 1 , wherein the movement comprises a combination of horizontal and vertical movement relative to the base layer.
13. The system of claim 1 , wherein the electro-mechanical system is comprised by an optical routing apparatus comprising a moveable micro-mirror.