Exposure chuck comprising a surface of a lift bar having a concavo-convex structure
View Patent ↗An exposure chuck includes a lift bar to transfer a substrate; a lift bar mounting unit including the lift bar to move the substrate; and a substrate loading unit to load the substrate as the lift bar in the lift bar mounting unit transfers the substrate such that the substrate is separated from the lift bar, wherein a surface of the lift bar contacting the substrate has a concavo-convex structure.
1. An exposure chuck, comprising:
a plurality of lift bars to transfer a transparent substrate having a transparent conductive film;
a lift bar mounting unit including the lift bars to move the substrate; and
a substrate loading unit to load the substrate as the lift bars in the lift bar mounting unit transfers the substrate such that the substrate is separated from the lift bars, wherein a surface of the lift bars contacting the substrate has a concavo-convex structure to scatter light incident on the surface so that the incident light may have a gradual gradient during an exposing process on the transparent conductive film of the substrate, and a convex portion of the concavo-convex structure has a width of 1mm or less, and a width of a concavo portion of the concavo-convex structure ranges from 1mm to 5mm,
wherein a plurality of lift bars are arranged in a straight shape when viewed from above,
wherein the lift bar mounting unit has a plurality of grooves for receiving the lift bars therein, and the grooves have same shape as that of the lift bar when viewed from above,
wherein the substrate loading unit comprises a contact portion contacting the substrate and a non-contact portion having a groove of a uniform depth, the substrate being contacted with the contact portion of the substrate loading unit and not contacted with the surface of the lift bars when the lift bars are completely received in the grooves of the lift bar mounting unit.
2. An exposure chuck, comprising:
a plurality of lift bars to transfer a transparent substrate having a transparent conductive film;
a lift bar mounting unit including the lift bars to move the substrate; and
a substrate loading unit to load the substrate as the lift bars in the lift bar mounting unit transfers the substrate such that the substrate is separated from the lift bars,
wherein a surface of the lift bars contacting the substrate has a concavo-convex structure to scatter light incident on the surface so that the incident light may have a gradual gradient during an exposing process on the transparent conductive film of the substrate, and a convex portion of the concavo-convex structure has a width of 1mm or less, and a width of a concavo portion of the concavo-convex structure ranges from 1mm to 5mm,
wherein a plurality of lift bars are arranged in a lattice shape when viewed from above,
wherein the lift bar mounting unit has a plurality of grooves for receiving the lift bars therein, and the grooves have same shape as that of the lift bar when viewed from above,
wherein the substrate loading unit comprises a contact portion contacting the substrate and a non-contact portion having a groove of a uniform depth, the substrate being contacted with the contact portion of the substrate loading unit and not contacted with the surface of the lift bars when the lift bars are completely received in the grooves of the lift bar mounting unit.