Method for cutting substrate using femtosecond laser
View Patent ↗A method for cutting a substrate is disclosed which uses a femtosecond laser capable of preventing thermal expansion and generation of shock waves from occurring around a region where a cutting process is carried out when the femtosecond laser is used to cut the substrate, thereby being capable of achieving a reduction in costs. The method includes the steps of arranging the substrate on a stage, and irradiating a femtosecond laser to a predetermined portion of the substrate arranged on the stage, thereby cutting the substrate along the predetermined substrate portion.
1. A method for cutting a substrate, comprising the steps of:
arranging a substrate on a stage;
generating a femtosecond laser from a femtosecond laser oscillator;
condensing the generated femtosecond laser through a condenser lens, wherein the femtosecond laser generated from the femtosecond laser oscillator is directly irradiated to the condenser lens, wherein a width direction of the condenser lens is parallel to a width direction of the stage on which the substrate is arranged;
irradiating the condensed femtosecond laser to a predetermined portion of the substrate arranged on the stage, thereby cutting the substrate along the predetermined substrate portion under a condition in which the cutting width is about 40 μm, as well as moving the stage or moving the femtosecond laser with respect to the stage, wherein the condensed femtosecond laser from the condenser lens is directly irradiated to the substrate;
identifying a cutting position on the substrate by a CCD camera arranged between the condenser lens and the predetermined portion of the substrate arranged on the stage;
monitoring a cutting condition when the substrate is cut, to allow an operator to identify the cutting condition; and
adjusting an intensity and a density of the femtosecond laser generated from the femtosecond laser oscillator, wherein the adjusted femtosecond laser is directly focused by the condenser lens, and is then irradiated to the predetermined portion of the substrate,
wherein the CCD camera is directly focused on the connection between the femtosecond laser and the predetermined portion of the substrate arranged on the stage,
wherein the femtosecond laser amplified through the condenser lens has a peak power of about terawatts (10 12 watts) to petawatts (10 15 watts) and uses a pulse energy of about micro-Joules (μJ) per pulse to milli-Joules per; and
wherein a hole is formed in the stage corresponding to the portion of the substrate irradiated the condensed femtosecond laser.
2. The method according to claim 1 , wherein the cutting of the substrate comprises moving the stage in one direction and fixing the femtosecond laser oscillator.
3. The method according to claim 1 , wherein the cutting of the substrate is carried out in accordance with a movement of the femtosecond laser oscillator in one direction in a fixed state of the stage.