Process for group III-V semiconductor nanostructure synthesis and compositions made using same
View Patent ↗Methods for producing nanostructures, particularly Group III-V semiconductor nanostructures, are provided. The methods include use of novel Group III and/or Group V precursors, novel surfactants, oxide acceptors, high temperature, and/or stable co-products. Related compositions are also described. Methods and compositions for producing Group III inorganic compounds that can be used as precursors for nanostructure synthesis are provided. Methods for increasing the yield of nanostructures from a synthesis reaction by removal of a vaporous by-product are also described.
1. A method for production of Group III-V semiconductor nanostructures, the method comprising:
providing a first precursor, the first precursor comprising a Group V atom substituted with three alkenyl groups, three alkynyl groups, three acyl groups, three furyl groups, three furfuryl groups, three carboxamide groups, three identical substituted and/or branched alkyl groups, three carboxylate moieties or three phosphinate moieties;
providing a second precursor comprising a Group III atom; and,
reacting the first and second precursors to produce the nanostructures.
2. The method of claim 1 , wherein the first precursor comprises a triacyl substituted Group V atom or a triacyl substituted Group V atom comprising a substituted acyl group.
3. The method of claim 2 , wherein the first precursor is a triacylphosphine.
4. The method of claim 3 , wherein the first precursor is tribenzoylphosphine, trialkylbenzoylphosphine, trihexylbenzoylphosphine, trialkoylphosphine, or trihexoylphosphine.
5. The method of claim 2 , wherein the second precursor comprises a Group III atom substituted with three unsaturated groups.
6. The method of claim 5 , wherein the first precursor is tribenzoylphosphine and the second precursor is tris-cyclopentadienyl indium, wherein the first precursor is tri-heptylbenzoylphosphine and the second precursor is tris-cyclopentadienyl indium, or wherein the first precursor is tri-heptylbenzoylphosphine and the second precursor is tris-hexylcyclopentadienyl indium.
7. A composition, comprising:
a first precursor, the first precursor comprising a Group V atom substituted with three alkenyl groups, three alkynyl groups, three acyl groups, three furyl groups, three furfuryl groups, three carboxamide groups, three identical substituted and/or branched alkyl groups, three carboxylate moieties, or three phosphinate moieties;
a second precursor comprising a Group III atom; and,
one or more nanostructures comprising the Group III atom and the Group V atom.
8. The composition of claim 7 , wherein the first precursor comprises a triacyl substituted Group V atom or a triacyl substituted Group V atom comprising a substituted acyl group.
9. The composition of claim 8 , wherein the first precursor is a triacylphosphine.
10. The composition of claim 9 , wherein the first precursor is tribenzoylphosphine, trialkylbenzoylphosphine, trihexylbenzoylphosphine, trialkoylphosphine, or trihexoylphosphine.
11. The composition of claim 8 , wherein the second precursor comprises a Group III atom substituted with three unsaturated groups.
12. The composition of claim 11 , wherein the first precursor is tribenzoylphosphine and the second precursor is tris-cyclopentadienyl indium, wherein the first precursor is tri-heptylbenzoylphosphine and the second precursor is tris-cyclopentadienyl indium, or wherein the first precursor is tri-heptylbenzoylphosphine and the second precursor is tris-hexylcyclopentadienyl indium.
13. A method for production of Group III-V semiconductor nanostructures, the method comprising:
providing a first precursor comprising a Group V atom;
providing a second precursor, the second precursor being
a) a Group III inorganic compound, other than a Group III acetate, that comprises a Group III atom which is directly bonded to at least one oxygen atom, that comprises one or more phosphonate, phosphinate, and/or carboxylate moieties bonded to a Group III atom, that is a Group III metal oxide, or that is a Group III alkoxy or Group III aryloxy, or
b) a Group III organometallic compound that comprises a Group III atom substituted with three alkenyl, alkynyl, acyl, cyclic ketone, cyclopentadienyl, or substituted cyclopentadienyl groups; and,
reacting the first and second precursors to produce the nanostructures.
14. The method of claim 13 , wherein the second precursor is tris-alpha-cyclohexanone indium (III).
15. The method of claim 13 , wherein the Group III organometallic compound of b) is an indium tris-Cp compound or an indium tris-(substituted Cp) compound.
16. The method of claim 13 , wherein the second precursor is tris-cyclopentadienyl indium(III) or tris(n-hexyl cyclopentadienyl) indium(III).
17. A composition, comprising:
a first precursor comprising a Group V atom;
a second precursor, the second precursor being
a) a Group III inorganic compound, other than a Group III acetate, that comprises a Group III atom which is directly bonded to at least one oxygen atom, that comprises one or more phosphonate, phosphinate, and/or carboxylate moieties bonded to a Group III atom, that is a Group III metal oxide, or that is a Group III alkoxy or Group III aryloxy, or
b) a Group III organometallic compound that comprises a Group III atom substituted with three alkenyl, alkynyl, acyl, cyclic ketone, cyclopentadienyl, or substituted cyclopentadienyl groups; and,
one or more nanostructures comprising the Group V atom and a Group III atom from the Group III inorganic compound of a) or the Group III organometallic compound of b).
18. The composition of claim 17 , wherein the second precursor is tris-alpha-cyclohexanone indium (III).
19. The composition of claim 17 , wherein the Group III organometallic compound of b) is an indium tris-Cp compound or an indium tris-(substituted Cp) compound.
20. The composition of claim 17 , wherein the second precursor is tris-cyclopentadienyl indium(III) or tris(n-hexyl cyclopentadienyl) indium(III).
21. A method for production of Group III-V semiconductor nanostructures, the method comprising:
providing a first precursor comprising a Group V atom;
providing a second precursor comprising a Group III atom;
reacting the first and second precursors to produce the nanostructures and at least one co-product, the co-product being an ester, a ketone, or an ether.
22. The method of claim 21 , wherein the first precursor comprises a trialkyl substituted Group V atom, the second precursor comprises a tricarboxylate substituted Group III atom, and the co-product comprises an ester.
23. The method of claim 21 , wherein the first precursor comprises a triacyl substituted Group V atom, the second precursor comprises a Group III atom substituted with three cyclic ketone groups or tris-alpha-cyclohexanone indium (III), and the co-product comprises an ester.
24. The method of claim 21 , wherein the first precursor comprises a triacyl substituted Group V atom, the second precursor comprises a Group III atom substituted with three cyclopentadienyl or substituted cyclopentadienyl groups, an indium tris-Cp compound, an indium tris-(substituted Cp) compound, tris-cyclopentadienyl indium(III), or tris(n-hexyl cyclopentadienyl) indium(III), and the co-product comprises a ketone.
25. The method of claim 21 , wherein the first precursor comprises a triacyl substituted Group V atom, the second precursor comprises a Group III alkoxy or aryloxy, and the co-product comprises an ester.
26. The method of claim 21 , wherein the first precursor comprises triphenylphosphine or a tri-alkylphosphine, the second precursor comprises tri-alkoxyindium, and the co-product comprises an ether.
27. A method for production of Group III-V semiconductor nanostructures, the method comprising:
providing a first precursor and a second precursor, wherein the first precursor comprises a trisubstituted Group V atom where the substituents are dienes and the second precursor comprises a trisubstituted Group III atom where the substituents are dienophiles, or wherein the first precursor comprises a trisubstituted Group V atom where the substituents are dienophiles and the second precursor comprises a trisubstituted Group III atom where the substituents are dienes; and,
reacting the first and second precursors to produce the nanostructures.
28. A composition, comprising:
a first precursor and a second precursor, wherein the first precursor comprises a trisubstituted Group V atom where the substituents are dienes and the second precursor comprises a trisubstituted Group III atom where the substituents are dienophiles, or wherein the first precursor comprises a trisubstituted Group V atom where the substituents are dienophiles and the second precursor comprises a trisubstituted Group III atom where the substituents are dienes; and,
one or more nanostructures comprising the Group III atom and the Group V atom.