Diffusion barrier coatings having graded compositions and devices incorporating the same
View Patent ↗A composite article comprises a substrate having at least a substrate surface and a graded-composition coating disposed on a substrate surface. The composition of the coating material varies substantially continuously across its thickness. The coating reduces the transmission rates of oxygen, water vapor, and other chemical species through the substrate such that the composite article can be used effectively as a diffusion barrier to protect chemically sensitive devices or materials. An organic light-emitting device incorporates such a composite article to provide an extended life thereto.
1. A method for making a composite article, said method comprising:
providing a substrate having at least a substrate surface;
depositing a coating material comprising an inorganic and an organic material, said coating material having a composition on said substrate surface; and
changing said composition of said coating material substantially continuously while said coating is being formed such that said composition varies substantially continuously across a thickness of said coating;
wherein the composition of said coating material varies across a thickness thereof such that a graph of the percent composition of one of the components of the coating versus the depth of the coating has plural peaks.
2. The method according to claim 1 , wherein said depositing is selected from the group consisting of plasma-enhanced chemical-vapor deposition, radio-frequency plasma-enhanced chemical-vapor deposition, expanding thermal-plasma chemical-vapor deposition, sputtering, reactive sputtering, electron-cyclotron-resonance plasma-enhanced chemical-vapor deposition, inductively-coupled plasma-enhanced chemical-vapor deposition, and combinations thereof.
3. The method according to claim 1 , wherein said substrate comprises a polymeric material selected from the group consisting of polyethyleneterephthalate, polyacrylates, polycarbonate, silicone, epoxy resins, silicone-functionalized epoxy resins, polyester, polyimide, polyetherimide, polyethersulfone, polyethylenenapthalene, polynorbonene, poly(cyclic olefins).
4. The method according to claim 1 , wherein said coating material further comprises material selected from the group consisting of organic, inorganic, ceramic materials, and combinations thereof.
5. The method according to claim 4 , wherein said inorganic and ceramic materials are selected from the group consisting of oxide, nitride, carbide, boride, and combinations thereof of elements of Groups IIA, IIIA, IVA, VA, VIA, VIIA, IB, and IIB, metals of Groups IIIB, IVB, and VB, and rare-earth metals.
6. The method according to claim 1 further comprising effecting a penetration of at least a portion of said coating material into said substrate to produce a diffuse region between said substrate and said coating.
7. The method according to claim 6 , wherein said diffuse region is produced by an energetic ion bombardment of a surface of said substrate to sputter a portion of a material of said substrate, and depositing a mixed material comprising sputtered substrate material and another material.
8. The method according to claim 1 , wherein said changing said composition of said coating is carried out by changing a composition of reactive species generated by a plasma that is directed at said substrate.
9. The method according to claim 1 wherein said plural peaks are substantially the same height.
10. The method according to claim 1 wherein the plurality of peaks is at least three.
11. The method according to claim 10 wherein the height of the peaks changes as a function of depth.