Serially connected thin film transistors and fabrication methods thereof
Serially connected thin film transistor (TFT) structure include an active layer shared by an N-type TFT region and a P-type TFT region. A contact hole is formed in an N/P junction between the N-type TFT region and the P-type TFT region and conductive carriers within an N-doped region at one end can be electrically connected to a P-doped region at the other end by a conductive layer formed in the contact hole, without formation of depletion regions at the N/P junction. Moreover, the N-type TFT region or the P-type TFT region is formed using the exposed gate insulating layer in mask regions on both sides of the gate electrode as ion implanting masks and lightly doped drain regions and source/drain regions are also simultaneously formed.
1 . A thin film transistor structure, comprising:
a first TFT of a first type having a first doped region of a first type;
a second TFT of a second type having a second doped region of a second type different from the first type, wherein the first region is contiguous to the second region.
2 . The structure as in claim 1 , wherein the first TFT and the second TFT share a common active layer comprising the first doped region and second doped region.
3 . The structure as in claim 1 , wherein a depletion region is formed at a junction between the first doped region and the second doped region.
4 . The structure as in claim 3 , further comprising a conductive layer electrically connected to the depletion region.
5 . The structure as in claim 1 , wherein comprising a contact hole exposing the depletion region at the junction of the first TFT and second TFT.
6 . The structure as in claim 5 , wherein the contact hole has a larger size than that of the depletion region formed at the junction.
7 . The structure as in claim 5 , wherein the contact hole has a size of about 3˜5 μm.
8 . The structure as in claim 1 , wherein the first doped region and the second doped region respectively has a lightly doped region with a doping concentration of about 1*10 12 ˜1*10 14 atom/cm 2 and a heavily doped region with a doping concentration of about 1*10 14 ˜1*10 16 atom/cm 2 .
9 . The structure as in claim 1 , wherein the first doped region has a lightly doped region with a doping concentration of about 1*10 12 ˜1*10 14 atom/cm 2 and the first doped region and the second doped region respectively has a heavily doped region with a doping concentration of about 1*10 14 ˜1*10 16 atom/cm 2 .
10 . The structure as in claim 1 , wherein the first type TFT is an N-type TFT and the second type TFT is a P-type TFT.
11 . The structure as in claim 1 , wherein the first TFT comprising a first gate insulating layer further comprises:
a central region, covering a first channel region of the common active layer;
a mask region, covering a first lightly doped region of the common active layer.
12 . The structure as in claim 11 , wherein the first gate insulating layer further comprises an extension region, extending from and covering the mask region in the first gate insulating layer to a first heavily doped region of the active layer, covering thereof, and the extension region has a thickness less than that of the mask region.
13 . The structure as in claim 1 , wherein the second gate insulating layer further comprises:
a central region, covering a second channel region of the common active layer;
a mask region, covering a second type lightly doped region of the common active layer.
14 . The structure as in claim 13 , wherein the second gate insulating layer further comprises an extension region, extending from and covering the mask region in the second gate insulating layer to a second heavily doped region of the active layer, covering thereof, and the extension region has a thickness less than that of the mask region.
15 . A method for fabricating a thin film transistor structure, comprising:
forming a first TFT of a first type having a first doped region of a first type;
forming a second TFT of a second type having a second doped region of a second type different from the first type, wherein the first region is formed contiguous to the second region.
16 . The method of claim 15 , wherein the forming of the first TFT and the forming of the second TFT comprise providing a common active layer, and forming the first doped region and second doped region in the common active layer.
17 . The method of claim 15 , further comprising forming a contact hole has a larger size than that of the depletion region formed at the junction.
18 . The method of claim 17 , wherein the contact hole has a size of about 3˜5 μm.
19 . A display device, comprising:
a display panel comprising a thin film transistor structure of claim 1; and
a controller operatively coupled to the display panel to control the display panel to render an image in accordance with an image date.
20 . An electronic device, comprising:
a display device of claim 19; and
an image data source coupled to the controller of the display device to provide the image data to the display device to render an image.