Vitreous carbon mask substrate for X-ray lithography
View Patent ↗The present invention is directed to the use of vitreous carbon as a substrate material for providing masks for X-ray lithography. The new substrate also enables a small thickness of the mask absorber used to pattern the resist, and this enables improved mask accuracy. An alternative embodiment comprised the use of vitreous carbon as a LIGA substrate wherein the VC wafer blank is etched in a reactive ion plasma after which an X-ray resist is bonded. This surface treatment provides a surface enabling good adhesion of the X-ray photoresist and subsequent nucleation and adhesion of the electrodeposited metal for LIGA mold-making while the VC substrate practically eliminates secondary radiation effects that lead to delamination of the X-ray resist form the substrate, the loss of isolated resist features, and the formation of a resist layer adjacent to the substrate that is insoluble in the developer.
1. A lithographic mask comprising a vitreous carbon substrate, wherein a surface of the vitreous carbon substrate comprises a microscopically roughened surface and a patterned metal X-ray absorber layer adhering to the microscopically roughened surface.
2. The lithographic mask of claim 1 , wherein the metal absorber layer comprises a metal strike layer.
3. The lithographic mask of claim 1 , wherein the metal absorber layer may comprise one or more layers comprising the same or different metals.
4. The lithographic mask of claim 2 , wherein the metal absorber layer is deposited by a process selected from the list consisting of electrodeposition, sputtering, particle vapor deposition, and combinations thereof.
5. The lithographic mask of claim 2 , wherein the metal absorber layer is deposited over the metal strike layer.
6. The lithographic mask of claim 1 , wherein the metal absorber layer is gold.
7. The lithographic mask of claim 2 , wherein the metal strike layer is selected from the list consisting of chromium, copper, gold and combinations thereof.
8. The lithographic mask of claim 1 , wherein the metal absorber layer is about 10 microns thick.
9. A lithographic mask comprising a vitreous carbon substrate, wherein a surface of the vitreous carbon substrate is etched in a reactive ion oxygen plasma to provide a microscopically roughened surface, and wherein an X-ray resist material is affixed to the microscopically roughened surface.
10. The lithographic mask of claim 9 , wherein the X-ray resist material comprises a polymer.
11. The lithographic mask of claim 10 , wherein the polymer is selected from the list consisting of PMMA and SU-8.
12. The lithographic mask of claim 9 , wherein the resist is affixed to the substrate by casting a polymer resin onto the surface of the substrate and curing the resin to produce a suitable resist layer.
13. The lithographic mask of claim 10 , wherein the X-ray resist material comprises a sheet.
14. The lithographic mask of claim 13 , wherein the sheet is affixed to the substrate by gluing the sheet to the surface of the substrate with a suitable adhesive.
15. The lithographic mask of claim 13 , wherein the sheet is affixed to the substrate by applying a thin spin-cast layer to the surface of the substrate and subsequently solvent bonding the sheet to the spin-cast layer.
16. The lithographic mask of claim 9 , wherein the X-ray resist material is exposed to a source of patterned X-ray radiation for a period of time, and wherein the exposed resist material is developed to remove portions of the resist material, thereby providing a plurality of areas open to the microscopically roughened surface.
17. The lithographic mask of claim 16 , wherein the open areas of the microscopically roughened surface are coated with a thin metal coating.
18. The lithographic mask of claim 17 , wherein the thin metal coating comprises one or more layers comprising the same or different metals.
19. The lithographic mask of claim 18 , wherein the thin metal coating is selected from the list consisting of chromium, nickel, copper, gold and combinations thereof.
20. The lithographic mask of claim 19 , wherein the thin metal coating is provided by a process selected from the list consisting of electrodeposition, sputtering, particle vapor deposition, and combinations thereof.
21. The lithographic mask of claim 17 , wherein the plurality of areas are filled with a thick metal layer deposited onto the thin metal coating.
22. The lithographic mask of claim 21 , wherein the thick metal layer is gold.
23. A method for preparing a microfabricated device, comprising the steps of.
providing a lithographic mask comprising a vitreous carbon substrate, wherein a surface of the vitreous carbon substrate is etched in a reactive ion oxygen plasma to provide a microscopically roughened surface, and wherein an X-ray resist material is affixed to the microscopically roughened surface;
exposing the lithographic mask to X-ray radiation through a patterned mask;
developing the exposed substrate to remove portions of the resist, thereby providing a plurality of areas open to the microscopically roughened surface of the vitreous carbon substrate; and
filling the plurality of areas open to the surface of the vitreous carbon substrate with a metal deposit.
24. The method of claim 23 , wherein the step of filling further includes a preliminary step of coating the plurality of areas open to the surface of the substrate with a thin metal coating.
25. The method of claim 24 , wherein the step of filling comprises electrodepositing the metal deposit onto the thin metal coating.