Method for manufacturing a pole for a magnetic recording head
View Patent ↗A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.
1. A method for manufacturing a pole for a magnetic recording head comprising:
sputtering at least one ferromagnetic layer;
fabricating a hard mask on the at least one ferromagnetic layer, the hard mask including at least one hard mask layer and at least one auxiliary mask layer on the at least one hard mask layer;
defining the pole using a removal process for removing a portion of the at least one ferromagnetic layer, the at least one ferromagnetic layer having a first removal rate for the removal process, the at least one hard mask layer having a second removal rate for the removal process, and the at least one auxiliary mask layer having a third removal rate for the removal process, the first removal rate and the third removal rate being greater than the second removal rate;
depositing a write gap on the pole; and
encapsulating a portion of the pole in an insulator.
2. The method of claim 1 wherein the fabricating further includes:
depositing a hard mask layer; and
patterning the hard mask layer to form the hard mask.
3. The method of claim 1 wherein the pole defining further includes:
trimming the pole using the hard mask to provide a desired profile of the pole.
4. The method of claim 3 wherein the desired profile is a trapezoid.
5. The method of claim 1 wherein the pole is a perpendicular magnetic recording pole.
6. The method of claim 1 wherein the pole is a longitudinal magnetic recording pole.
7. The method of claim 1 further comprising:
performing a chemical mechanical planarization of at least the insulator.
8. The method of claim 7 wherein the performing step further includes:
utilizing a portion of the hard mask as a stop layer for the chemical mechanical planarization.
9. The method of claim 7 further comprising:
providing a chemical mechanical planarization stop layer on the write gap.
10. The method of claim 1 further comprising:
removing the hard mask after the encapsulating step.
11. The method of claim 10 further comprising:
performing a chemical mechanical planarization after the hard mask is removed.
12. The method of claim 1 further comprising:
fabricating a substantially flat shield on at least the write gap.
13. The method of claim 1 wherein the first removal rate is substantially the same as the third removal rate.
14. The method of claim 13 wherein the at least one auxiliary mask layer includes NiFe.