IP Library Granted Patent US 7,451,539
Granted Patent B2
US 7,451,539 · App. 11/199,319 · Granted Nov 18, 2008

Method of making a conformal electromagnetic interference shield

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Quick Facts
Patent No.
US 7,451,539
App. No.
11/199,319
Granted
Nov 18, 2008
Kind
B2
Abstract

An electromagnetic shield for an electronic module includes a surface finish that is applied to the surface of an electronic module so as to minimize the size of the shield. Once the shield is in place, the shield acts to address electromagnetic interference (EMI) concerns associated with the electronic module. An electronic module having a ring of conductive material embedded about its peripheral edge is formed. The electronic module is then sub-diced so as to expose the ring of conductive material. After sub-dicing, a conductive material may be applied through an electroless plating process followed by an electrolytic plating process. Alternatively, a conductive epoxy may be sprayed or painted onto the surface of the electronic module.

Claims (37)

1. A method of manufacturing an electronic module comprising:

forming an electronic metamodule comprising a plurality of electronic modules;

exposing a conductive element associated with each of the plurality of electronic modules to provide exposed conductive elements;

forming an electromagnetic shield on an exterior surface of each of the plurality of electronic modules by:

generating a seed layer of conductive material on the exterior surface of each of the plurality of electronic modules and on the exposed conductive elements;

generating a second layer of material on the seed layer through an electrolytic plating process; and

generating a third layer of material on the second layer through a second electrolytic plating process; and singulating each of the plurality of electronic modules.

2. The method of claim 1 further comprising removing a masking agent from an input/output side of each of the electronic modules after applying the electromagnetic shield.

3. The method of claim 1 further comprising desmearing a top surface of the electronic metamodule prior to forming the electromagnetic shield.

4. The method of claim 1 wherein generating the seed layer of conductive material on the exterior surface of each of the plurality of electronic modules comprises generating a seed layer of copper (Cu) on the exterior surface.

5. The method of claim 1 wherein generating the seed layer comprises using an electroless plating process to generate the seed layer.

6. The method of claim 1 wherein the second layer comprises a conductive material.

7. The method of claim 6 wherein the second layer is formed from copper (Cu).

8. The method of claim 1 wherein the second layer comprises a material that is a relatively poor conductor compared to the seed layer.

9. The method of claim 8 wherein the second layer is formed from nickel (Ni).

10. The method of claim 1 wherein the third layer comprises a material that is a relatively poor conductor compared to the seed layer.

11. A method of manufacturing an electronic module comprising:

providing an electronic meta-module comprising a substrate, circuitry on a surface of the substrate and associated with a plurality of electronic modules, and a body formed from a dielectric material that covers the circuitry associated with the plurality of electronic modules, wherein each of the plurality of modules is associated with a conductive element that is covered by the body;

exposing at least a portion of the conductive element associated with each of the plurality of electronic modules through the body to provide exposed conductive elements;

forming an electromagnetic shield over portions of an exterior surface of the body for each of the plurality of electronic modules and on the exposed conductive elements, by:

generating a seed layer of conductive material on the exterior surface of the body for each of the plurality of electronic modules and on the exposed conductive elements;

generating a second layer of material on the seed layer through an electrolytic plating process; and

generating a third layer of material on the second layer through a second electrolytic plating process; and

separating each of the plurality of electronic modules of the electronic meta-module from each other, wherein each of the plurality of electronic module comprises an electromagnetic shield, which is electrically coupled to a corresponding one of the exposed conductive elements.

12. The method of claim 11 wherein the electromagnetic shield material is applied over the portions of the exterior surface of the body prior to each of the plurality of electronic modules being separated from the electronic meta-module.

13. The method of claim 11 further comprising roughening the portions of the exterior surface of the body prior to forming the electromagnetic shield.

14. The method of claim 11 wherein the body is formed by uniformly covering the circuitry associated with the plurality of electronic modules with the dielectric material, such that the body is initially a single, continuous element that covers all of the plurality of electronic modules prior to exposing the exposed conductive elements.

15. The method of claim 11 wherein the body is formed from an overmold material using an overmolding process.

16. The method of claim 11 wherein the conductive elements are formed on the surface of the substrate.

17. The method of claim 11 wherein the conductive element for each of the plurality of modules is part of a metallic grid that is formed on the meta-module and defines a plurality of sub-modules for the plurality of modules.

18. The method of claim 11 wherein generating the seed layer of conductive material on the exterior surface of each of the plurality of electronic modules comprises generating a seed layer of copper (Cu) on the exterior surface.

19. The method of claim 11 wherein generating the seed layer comprises using an electroless plating process to generate the seed layer.

20. The method of claim 11 wherein the second layer comprises a conductive material.

21. The method of claim 20 wherein the second layer is formed from copper (Cu).

22. The method of claim 11 wherein the second layer comprises a material that is a relatively poor conductor compared to the seed layer.

23. The method of claim 22 wherein the second layer is formed from nickel (Ni).

24. The method of claim 11 wherein the third layer comprises a material that is a relatively poor conductor compared to the seed layer.

Assignments (4)
MERGER Recorded Jun 16, 2016
From: RF MICRO DEVICES, INC.
To: QORVO US, INC.
Reel/Frame 039196/0941 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS (RECORDED 3/19/13 AT REEL/FRAME 030045/0831) Recorded Mar 30, 2015
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: RF MICRO DEVICES, INC.
Reel/Frame 035334/0363 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Mar 19, 2013
From: RF MICRO DEVICES, INC.
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 030045/0831 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2005
From: MORRIS, THOMAS SCOTT; SHAH, MILIND; LEAHY, DONALD JOSEPH; LAW, LEWIS KERMIT, II
To: RF MICRO DEVICES, INC.
Reel/Frame 016877/0362 →