Electro-optical method of manufacturing spacer light-shielding film simultaneously with switching unit element using same materials and process
View Patent ↗An electro-optical device includes a substrate; electrodes formed on the substrate; switching elements connected to the electrodes, respectively; an electro-optical material layer disposed on the electrodes and the switching elements; photospacers that regulate the thickness of the electro-optical material layer; and spacer light-shielding films, each being provided between a corresponding photospacer and the substrate. Each of the spacer light-shielding films is made of the same material as at least one of a plurality of elements constituting each of the switching elements.
1. A method of manufacturing an electro-optical device, comprising:
forming a switching unit on a substrate;
forming spacer light-shielding films on the substrate;
forming an electrode on the substrate to be electrically connected to the switching unit, the switching unit including a plurality of elements;
forming photospacers for maintaining the thickness of an electro-optical material layer, each photospacer being formed over a corresponding one of the plurality of spacer light-shielding films; and
positioning the electro-optical material layer on the substrate to overlap the electrode,
wherein the forming of the spacer light-shielding films is simultaneously formed and uses the same material and process as those used to form at least one of a plurality of elements constituting the switching unit.
2. The method of manufacturing an electro-optical device according to claim 1 , further comprising:
forming interdot light-shielding regions so as to bury a plurality of display dot regions, each being a display unit,
wherein the photospacers are provided within the display dot regions.
3. The method of manufacturing an electro-optical device according to claim 2 , further comprising:
forming a plurality of coloring elements, each having a different color, at a side opposite to the substrate with the electro-optical materials therebetween,
wherein, in the forming of the interdot light-shielding regions, the interdot light-shielding regions are formed by overlapping the coloring elements with different colors.
4. The method of manufacturing an electro-optical device according to claim 1 ,
wherein the forming of the switching unit includes:
forming a first metal on the substrate;
forming an insulating film on the first metal; and
forming a second metal on the insulating film,
wherein the forming of the spacer light-shielding films is performed using the same material and process as those used to form the first or second metals.