MOS transistor with laser-patterned metal gate, and method for making the same
View Patent ↗A MOS transistor with a laser-patterned metal gate, and methods for its manufacture. The method generally includes forming a layer of metal-containing material on a dielectric film, wherein the dielectric film is on an electrically functional substrate comprising an inorganic semiconductor; laser patterning a metal gate from the metal-containing material layer; and forming source and drain terminals in the inorganic semiconductor in locations adjacent to the metal gate. The transistor generally includes an electrically functional substrate; a dielectric film on at least portions of the electrically functional substrate; a laser patterned metal gate on the dielectric film; and source and drain terminals comprising a doped inorganic semiconductor layer adjacent to the metal gate. The present invention advantageously provides MOS thin film transistors having reliable electrical characteristics quickly, efficiently, and/or at a low cost by eliminating one or more conventional photolithographic steps.
1. An electronic device, comprising:
a) a substrate;
b) a semiconductor layer on the substrate;
c) a dielectric film on at least portions of said substrate and/or said semiconductor layer;
d) a laser written metal gate on the dielectric film; and
e) source and drain terminals comprising a doped layer on or in said semiconductor layer, substantially adjacent to said laser written metal gate, wherein each of said source and drain terminals has a border closest to said laser written metal gate that is substantially aligned with a border of said laser written metal gate.
2. The electronic device of claim 1 , further comprising (i) one or more first conductors electrically connected to each of said source and drain terminals and (ii) a second conductor electrically connected to said laser written metal gate.
3. The electronic device of claim 2 , wherein said second conductor comprises at least one conductive and/or barrier layer, and said second conductor contacts a landing pad region of the laser written metal gate.
4. The electronic device of claim 3 , wherein said landing pad region has a width of from 1.25 to 4 times a width of said laser written metal gate.
5. The electronic device of claim 2 , further comprising a second dielectric and/or a passivation layer over said first and second conductors and said laser written metal gate.
6. The electronic device of claim 1 , wherein said substrate and said semiconductor layer comprise an electrically inert substrate and a transistor channel layer thereon.
7. The electronic device of claim 6 , wherein said transistor channel layer comprises a lightly doped semiconductor.
8. The electronic device of claim 1 , wherein said doped layer comprises an electrically active, polycrystalline Group IVA semiconductor layer.
9. The electronic device of claim 1 , wherein said dielectric film has a thickness of from 20 Å to 400 Å.
10. The electronic device of claim 1 , wherein said laser written metal gate has a width greater than a width of said dielectric film.
11. The electronic device of claim 1 , wherein said laser written metal gate has a width of at least 2 microns.
12. The electronic device of claim 1 , wherein said laser written metal gate has a width of at least 5 microns.
13. The electronic device of claim 1 , wherein said laser written metal gate consists essentially of a metal or a metal alloy.
14. The electronic device of claim 13 , wherein said laser written metal gate consists essentially of cured and/or annealed metal nanoparticles.
15. The electronic device of claim 1 , wherein said laser written metal gate has a thickness of from 50 nm to 5000 nm.
16. The electronic device of claim 1 , wherein said source and drain terminals comprise a heavily doped semiconductor layer.
17. The electronic device of claim 1 , wherein said dielectric film has a thickness greater than a thickness of said source and drain terminals.
18. The electronic device of claim 1 , wherein said substrate comprises a glass plate, a ceramic plate or disc, a plastic sheet or disc, metal foil, a metal sheet or disc, or a laminated or layered combination thereof.
19. The electronic device of claim 18 , wherein said substrate comprises said metal foil and a barrier layer directly thereon.
20. The electronic device of claim 18 , wherein said substrate comprises said metal foil and said dielectric layer directly thereon.
21. The electronic device of claim 1 , wherein said laser written metal gate comprises a cured and/or annealed metal precursor, said metal precursor comprising at least one photodefinable metal-containing species.
22. The electronic device of claim 1 , wherein said laser written metal gate comprises a directly irradiated metal precursor.
23. The electronic device of claim 1 , wherein said laser written metal gate is formed by a process comprising directly irradiating a portion of a metal precursor and removing non-irradiated portions of said metal precursor with a developer.
24. An electronic device, comprising:
a) a substrate;
b) a semiconductor layer on the substrate;
c) a dielectric film on at least portions of said substrate and/or said semiconductor layer;
d) a laser written metal gate on the dielectric film, said metal gate having a width of at least 2 microns; and
e) source and drain terminals comprising a doped layer on or in said semiconductor layer, substantially adjacent to said laser written metal gate.
25. The electronic device of claim 24 , wherein each of said source and drain terminals has a border closest to said laser written metal gate that is substantially aligned with a border of said laser written metal gate.
26. The electronic device of claim 24 , further comprising (i) one or more first conductors electrically connected to each of said source and drain terminals and (ii) a second conductor electrically connected to said laser written gate.
27. The electronic device of claim 26 , wherein said second conductor comprises at least one conductive and/or barrier layer, and said second conductor contacts a landing pad region of the laser written metal gate.
28. The electronic device of claim 27 , wherein said landing pad region has a width of from 1.25 to 4 times a width of said laser written metal gate.
29. The electronic device of claim 26 , further comprising a second dielectric and/or a passivation layer over said first and second conductors and said laser written metal gate.
30. The electronic device of claim 24 , wherein said substrate and said semiconductor layer comprise an electrically inert substrate and a transistor channel layer thereon.
31. The electronic device of claim 30 , wherein said transistor channel layer comprises a lightly doped semiconductor.
32. The electronic device of claim 24 , wherein said doped layer comprises an electrically active, polycrystalline Group IVA semiconductor layer.
33. The electronic device of claim 24 , wherein said dielectric film has a thickness of from 20 Å to 400 Å.
34. The electronic device of claim 24 , wherein said laser written metal gate has a width greater than a width of said dielectric film.
35. The electronic device of claim 24 , wherein said laser written metal gate has a width of at least 5 microns.
36. The electronic device of claim 24 , wherein said laser written metal gate consists essentially of a metal or a metal alloy.
37. The electronic device of claim 36 , wherein said laser written metal gate consists essentially of cured and/or annealed metal nanoparticles.
38. The electronic device of claim 24 , wherein said laser written metal gate has a thickness of from 50 nm to 5000 nm.
39. The electronic device of claim 24 , wherein said source and drain terminals comprise a heavily doped semiconductor layer.
40. The electronic device of claim 24 , wherein said dielectric film has a thickness greater than a thickness of said source and drain terminals.
41. The electronic device of claim 24 , wherein said substrate comprises a glass plate, a ceramic plate or disc, a plastic sheet or disc, metal foil, a metal sheet or disc, or a laminated or layered combination thereof
42. The electronic device of claim 41 , wherein said substrate comprises said metal foil and a barrier layer thereon.
43. The electronic device of claim 41 , wherein said substrate comprises said metal foil and said dielectric layer thereon.
44. The electronic device of claim 24 , wherein said laser written metal gate comprises a cured and/or annealed metal precursor, said metal precursor comprising at least one photodefinable metal-containing species.
45. The electronic device of claim 24 , wherein said laser written metal gate comprises a directly irradiated metal precursor.
46. The electronic device of claim 24 , wherein said laser written metal gate is formed by a process comprising directly irradiating a portion of a metal precursor and removing non-irradiated portions of said metal precursor with a developer.