Semiconductor device having a high breakdown voltage transistor formed thereon
View Patent ↗An ion-through region 100, 102 is provided as a first opening in a passivation film 90 on a source electrode 70 and a drain electrode 80 . The passivation film 90 is coated with a sealing resin to package the semiconductor device. At this point, the ion-through region 100, 102 is filled with the sealing resin to put the sealing resin into direct contact with the source electrode 70 and the drain electrode 80 . With this structure, movable ions accumulated at an interface of the sealing resin with the passivation film 90 in a high temperature and high humidity atmosphere are discharged to the source electrode 70 and the drain electrode 80 via the ion-through region 100, 102 and thus do not influence an N − -type extended drain region 30 . Therefore, the drain breakdown voltage can be improved.
1. A semiconductor device in which a semiconductor substrate having a high breakdown voltage transistor formed thereon is covered with a sealing resin, the semiconductor device comprising:
a source region and a drain region formed in a main surface portion of the semiconductor substrate;
a gate insulating film formed on the drain region and having an end extended to overlap the source region;
a gate electrode formed on the gate insulating film;
a source electrode connected to the source region;
a drain electrode connected to the drain region;
an inter-layer film for covering the gate electrode and electrically insulating the gate electrode, the source electrode and the drain electrode from one another;
a passivation film for covering an entire surface of a semiconductor substrate body;
a first opening formed in the passivation film; and
a sealing resin formed on the passivation film;
wherein:
the first opening is formed on at least either one of the source electrode and the drain electrode; and
the sealing resin fills the first opening and is in direct contact with at least either one of the source electrode and the drain electrode.
2. A semiconductor device in which a semiconductor substrate having a high breakdown voltage transistor formed thereon is covered with a sealing resin, the semiconductor device comprising:
a source region and a drain region formed in a main surface portion of the semiconductor substrate;
a gate insulating film formed on the drain region and having an end extended to overlap the source region;
a gate electrode formed on the gate insulating film;
a source electrode connected to the source region;
a drain electrode connected to the drain region;
an inter-layer film for covering the gate electrode and electrically insulating the gate electrode, the source electrode and the drain electrode from one another;
a passivation film for covering an entire surface of a semiconductor substrate body;
a first opening formed in the passivation film;
a sealing resin formed on the passivation film; and
an assisting electrode provided below the passivation film and electrically connected to the source electrode or the drain electrode;
wherein:
the assisting electrode is formed of a conductive material which is different from a material forming the source electrode or the drain electrode connected to the assisting electrode;
the first opening is formed on the assisting electrode; and
the sealing resin fills the first opening and is in direct contact with the assisting electrode.
3. A semiconductor device according to claim 1 , wherein:
the passivation film has a second opening formed therethrough for connecting a metal wire extended from the outside of the semiconductor device to at least one type of electrode selected from the source electrode and the drain electrode; and
the first opening and the second opening are discrete from each other.
4. A semiconductor device according to claim 1 or 2 , wherein:
the inter-layer film has a contact hole formed therethrough on a part of the source region or the drain region;
the source electrode or the drain electrode fill the contact hole so as to be respectively connected to the source region or the drain region which is below the contact hole; and
the first opening and the contact hole are located at positions which do not overlap each other in a direction perpendicular to the surface of the semiconductor substrate.
5. A semiconductor device according to claim 1 or 2 , wherein:
the drain region includes a high concentration drain region having a relatively high impurity concentration and an extended drain region having an impurity concentration lower than the impurity concentration of the high concentration drain region; and
the drain electrode is connected to the high concentration drain region.
6. A semiconductor device according to claim 2 , wherein:
the passivation film has a second opening formed therethrough for connecting a metal wire extended from the outside of the semiconductor device to the assisting electrode; and
the first opening and the second opening are discrete from each other.