Method of fabricating organic FETs
At least two thicknesses of dielectric are formed in the fabrication of organic field effect transistors. One thickness is formed in the active regions of the transistor for adjusting the desired threshold of the device. A second thickness is deposited in the field regions of the transistor to electrically isolate the transistors, and reduces leakage current and capacitance. A third dielectric thickness that is thicker than the first thickness but thinner than the second thickness can be used to define transistors having a second threshold voltage. The multiple dielectric thicknesses can be produced by multiple cell sizes of a gravure roll when using gravure printing, multiple cell sizes in an anolox roll in flexography printing, multiple nozzle size and chamber pressure in inkjet printing, or by printing successive layers of a single thickness of dielectric. The method can be employed in top gate, bottom gate top contact, and in bottom gate bottom contact organic transistor structures.
1 . A method of forming an organic transistor device structure comprising:
forming an insulating substrate layer;
forming an organic semiconductor layer;
forming source, drain, and gate regions; and
forming a dielectric layer having at least a first thickness and a second thickness.
2 . The method of claim 1 , wherein a first dielectric thickness is used in a first organic transistor having a first threshold voltage, and a second dielectric thickness is used to minimize leakage current and capacitance between the first organic transistor and an additional transistor in the organic transistor device structure.
3 . The method of claim 2 , wherein the dielectric layer has at least a third dielectric thickness, thicker than the first thickness and thinner than the second thickness, to form a second organic transistor having a second threshold voltage.
4 . The method of claim 1 , wherein the layers and regions are combined to form an isolated top gate organic FET structure.
5 . The method of claim 1 , wherein the layers and regions are combined to form an isolated bottom gate top contact organic FET structure.
6 . The method of claim 1 , wherein the layers and regions are combined to form an isolated bottom gate bottom contact organic FET structure.
7 . The method of claim 1 , wherein the dielectric layer is formed using gravure printing wherein cells on the gravure roll on the image areas are varied in depth.
8 . The method of claim 1 , wherein the dielectric layer is formed using gravure printing wherein the cells on the gravure roll on the image areas are joined with a lower surface than the surface level of the non-image areas.
9 . The method of claim 1 , wherein the dielectric layer is formed using gravure printing wherein the cells on the gravure roll on the image area consist of a single cavity.
10 . The method of claim 1 , wherein the dielectric layer is formed using flexography printing wherein the cells in anolox rolls are varied in depth.
11 . The method of claim 1 , wherein the dielectric layer is formed using ink jet printing wherein parameters controlling an inkjet head are varied.
12 . The method of claim 1 , wherein the dielectric layer is formed by printing two successive dielectric layers.
13 . The method of claim 1 , wherein the dielectric layer is formed using a layer of polyvinylphenol, polypropylene, CYTOP, polyvinylalcohol, ployisobutylene, PMMA, polyethylene terephthalate, poply-p-xylylene, CYMM, or spin-on glass.
14 . An organic transistor device structure comprising:
an insulating substrate layer;
an organic semiconductor layer;
source, drain, and gate regions; and
a dielectric layer having at least a first thickness and a second thickness.
15 . The device structure of claim 14 , wherein a first dielectric thickness is used in a first organic transistor having a first threshold voltage, and a second dielectric thickness is used to minimize leakage current and capacitance.
16 . The device structure of claim 15 , wherein the dielectric layer has at least a third dielectric thickness, thicker than the first thickness and thinner than the second thickness, to form a second organic transistor having a second threshold voltage.
17 . The device structure of claim 14 , wherein the layers and regions form an isolated top gate organic FET structure.
18 . The device structure of claim 14 , wherein the layers and regions form an isolated bottom gate top contact organic FET structure.
19 . The device structure of claim 14 , wherein the layers and regions form an isolated bottom gate bottom contact organic FET structure.
20 . The device structure of claim 14 , wherein the dielectric layer comprises two dielectric layers.
21 . The device structure of claim 14 , wherein the dielectric layer comprises a layer of polyvinylphenol, polypropylene, CYTOP, polyvinylalcohol, ployisobutylene, PMMA, polyethylene terephthalate, poply-p-xylylene, CYMM, or spin-on glass.
22 . An organic transistor device structure comprising:
an organic transistor including a dielectric layer having a first thickness; and
an isolation region including a dielectric layer having a second thickness.