Etchant composition for indium oxide layer and etching method using the same
View Patent ↗An etchant for removing an indium oxide layer includes sulfuric acid as a main oxidizer, an auxiliary oxidizer such as H 3 PO 4 , HNO 3 , CH 3 COOH, HClO 4 , H 2 O 2 , and a Compound A that is obtained by mixing potassium peroxymonosulfate (2KHSO 5 ), potassium bisulfate (KHSO 4 ), and potassium sulfate (K 2 SO 4 ) together in the ratio of 5:3:2, an etching inhibitor comprising an ammonium-based material, and water. The etchant may remove desired portions of the indium oxide layer without damage to a photoresist pattern or layers underlying the indium oxide layer.
1. An etchant for removing an indium oxide layer, comprising:
about 1 wt % to about 15 wt % of sulfuric acid based on the total weight of the etchant;
about 0.02 wt % to about 5 wt % of an auxiliary oxidizer;
about 0.01 wt % to about 5 wt % of an etching inhibitor; and
a balance amount of water of at least about 75 wt %.
2. The etchant of claim 1 , wherein the etching inhibitor comprises ammonium ion-containing compounds.
3. The etchant of claim 1 , wherein the auxiliary oxidizer is selected from the group consisting of H 3 PO 4 , HNO 3 , CH 3 COOH, HClO 4 , H 2 O 2 , and Compound A, wherein Compound A is obtained by mixing potassium peroxymonosulfate (2KHSO 5 ), potassium bisulfate (KHSO 4 ), and potassium sulfate (K 2 SO 4 ) together in the ratio of 5:3:2.
4. The etchant of claim 1 , wherein the etching inhibitor is selected from the group consisting of CH 3 COONH 4 , NH 4 SO 3 NH 2 , NH 4 C 6 H 5 O 2 , NH 4 COONH 4 , NH 4 Cl, NH 4 H 2 PO 4 , NH 4 OOCH, NH 4 HCO 3 , H 4 NO 2 CCH 2 C(OH)(CO 2 NH 4 )CH 2 CO 2 NH 4 , NH 4 PF 6 , HOC(CO 2 H)(CH 2 CO 2 NH 4 ) 2 , NH 4 NO 3 , (NH 4 ) 2 S 2 O 8 , H 2 NSO 3 NH 4 , and (NH 4 ) 2 SO 4 .
5. The etchant of claim 1 , wherein the water is deionized.
6. The etchant of claim 1 , further comprising an additive selected from the group consisting of a surfactant, a metal-ion sequestering agent, and a corrosion inhibiting agent.
7. The etchant of claim 1 , wherein the indium oxide layer comprises indium zinc oxide (IZO) or indium tin oxide (ITO).