Method of manufacturing an organic light-emitting display apparatus having a diamond-like carbon film in contact wiring
View Patent ↗An organic light-emitting display apparatus includes a substrate; an emission control circuit formed on the substrate; an insulating layer covering the control circuit; an organic light-emitting device including a first electrode and a second electrode and formed on the insulating layer; and a contact wiring structure for electrically connecting the emission control circuit and the organic light-emitting device. The contact wiring structure includes a first conductive layer made of the same material as the first electrode; a second conductive layer made of the same material as the second electrode; and a diamond-like carbon film between the first conductive layer and the second conductive layer.
1. A method of manufacturing an organic light-emitting diode display apparatus, comprising:
forming an emission control circuit on a substrate;
forming an insulating layer on the emission control circuit, the insulating layer having a hole where the emission control circuit is exposed and a flat region;
depositing a first conductive layer over the hole and the flat region of the insulating layer;
depositing a first diamond-like carbon layer on the first conductive layer located on the hole and the flat region;
etching the first conductive layer and the first diamond-like carbon layer with a common mask to divide the first conductive layer into a first layer and a second layer, to divide the first diamond-like carbon layer into a first diamond-like carbon film on the first layer and a second diamond-like carbon film on the second layer; and
forming on the second diamond-like carbon film an emitting layer made of an organic material generating light by charge injection.
2. The method according to claim 1 , further comprising
depositing a second diamond-like carbon layer over the emitting layer and the first diamond-like carbon film; and
depositing a second conductive layer on the second diamond-like carbon layer.
3. The method according to claim 2 , further comprising
etching the second conductive layer and the second diamond-like carbon layer with a common mask.
4. The method according to claim 2 , wherein
the depositing of the second diamond-like carbon layer and the depositing of the second conductive layer include depositing under a temperature lower than a glass transition temperature of the organic material.