Microfabricated fluidic circuit elements and applications
View Patent ↗The present invention provides microfabricated fluidic systems and methods. Microfabricated fluidic devices of the present invention include switches that can be opened and closed to allow or block the flow of fluid through a channel in response to the pressure level in a gate of the switch. The microfabricated fluidic switches may be coupled together to perform logic functions and Boolean algebra, such as inverters, AND gates, NAND, gates, NOR gates, and OR gates. The logic gates may be coupled together to form flip-flops that latch signals. The present invention also includes microfabricated fluidic pressure multipliers that increase the pressure in a second chamber relative to a first chamber. Microfabricated fluidic devices of the present invention also include pressure sources. A pressure source of the present includes a pump coupled to a reservoir through unidirectional valves. The pressure source may be high pressure source or a low pressure source. Microfabricated fluidic devices of the present invention may also include devices that perform analog functions such as switching regulator.
1. A microfabricated fluidic switch, comprising:
an elastomer block at least partially enclosing a gate channel formed in a first elastomer layer and associated with a first pressure, and a drain-to-source channel formed in a second elastomer layer and associated with a second pressure, the elastomer block configured to close or open the drain-to-source channel in response to pressure changes in the gate channel, wherein a rigid material is formed on the second elastomer layer in the gate channel,
wherein the elastomer block is capable of closing the drain-to-source channel if the first pressure in the gate channel does not increase above the second pressure in the drain-to-source channel.
2. The microfabricated fluidic switch of claim 1 wherein a first chamber is formed in the second elastomer layer.
3. The microfabricated fluidic switch of claim 2 wherein a second chamber is formed in the second elastomer layer adjacent to the drain-to-source channel.
4. The microfabricated fluidic switch of claim 1 wherein a first chamber is formed in the first elastomer layer adjacent to the gate channel.
5. The microfabricated fluidic switch of claim 4 wherein a second chamber is formed in the second elastomer layer adjacent to the drain-to-source channel.
6. The microfabricated fluidic switch of claim 1 wherein the microfabricated fluidic switch is a pressure actuated normally open switch.
7. The microfabricated fluidic switch of claim 1 wherein the microfabricated fluidic switch is a pressure actuated normally closed switch.
8. The microfabricated fluidic switch of claim 1 wherein the microfabricated fluidic switch is a vacuum actuated normally open switch.
9. The microfabricated fluidic switch of claim 1 wherein the microfabricated fluidic switch is a vacuum actuated normally closed switch.
10. The microfabricated fluidic switch of claim 1 wherein:
the gate channel is associated with a dimension ranging from 2.5 μm to 5000 μm; and
the drain-to-source channel is associated with a dimension ranging from 0.1 μm to 1000 μm.
11. The microfabricated fluidic switch of claim 1 wherein:
each of the first elastomer layer and the second elastomer layer is associated with a dimension ranging from 1 μm to 1000 μm.
12. A microfabricated fluidic switch, comprising:
an elastomer block at least partially enclosing a gate channel connected to a gate chamber and associated with a first pressure, a drain-to-source channel connected to a first drain-to-source chamber and associated with a second pressure, and a rigid material between the gate chamber and the first drain-to-source chamber;
wherein
the elastomer block is configured to close or open the drain-to-source channel by levering the rigid material in response to a change in the first pressure; and
in order to close the drain-to-source channel the change in the first pressure does not need to cause the first pressure to increase above the second pressure in the drain-to-source channel.
13. The microfabricated fluidic switch of claim 12 wherein the gate channel is formed in a first elastomer layer and the drain-to-source channel is formed in a second elastomer layer.
14. The microfabricated fluidic switch of claim 13 wherein the first drain-to-source chamber is formed in the second elastomer layer, the first drain-to-source chamber connected to the drain-to-source channel.
15. The microfabricated fluidic switch of claim 14 wherein a second drain-to-source chamber is formed in the first elastomer layer, the second drain-to-source chamber connected to the drain-to-source channel.
16. The microfabricated fluidic switch of claim 13 wherein:
each of the first elastomer layer and the second elastomer layer is associated with a first dimension ranging from 1 μm to 1000 μm; and
each of the gate chamber and the drain-to-source chamber is associated with a second dimension ranging from 2.5 μm to 5000 μm.
17. The microfabricated fluidic switch of claim 13 wherein a gate chamber is formed in the first elastomer layer, the gate chamber connected to the gate channel.
18. The microfabricated fluidic switch of claim 17 wherein a third drain-to-source chamber is formed in the second elastomer layer, the third drain-to-source chamber connected to the drain-to-source channel.
19. The microfabricated fluidic switch of claim 12 wherein the microfabricated fluidic switch is a pressure actuated normally open switch.
20. The microfabricated fluidic switch of claim 12 wherein the microfabricated fluidic switch is a pressure actuated normally closed switch.
21. The microfabricated fluidic switch of claim 12 wherein the microfabricated fluidic switch is a vacuum actuated normally open switch.
22. The microfabricated fluidic switch of claim 12 wherein the microfabricated fluidic switch is a vacuum actuated normally closed switch.
23. The microfabricated fluidic switch of claim 12 wherein the rigid material is associated with a dimension ranging from 1 μm to 100 μm.