Method of fabricating organic light emitting display
View Patent ↗A method of fabricating a donor substrate for a laser induced thermal imaging (LITI) process. A base substrate is prepared. A light-to-heat conversion layer is formed on the base substrate. A buffer layer is formed on the light-to-heat conversion layer. The surface roughness of the buffer layer is increased by treating the surface of the buffer layer. A transfer layer is formed on the surface-treated buffer layer. By using the donor substrate, a patterning process can be performed better during the fabrication of the OLED.
1. A method of fabricating a donor substrate for a laser induced thermal imaging process, comprising:
preparing a base substrate;
forming a light-to-heat conversion layer on the base substrate;
forming a buffer layer on the light-to-heat conversion layer;
increasing surface roughness of the buffer layer; and
forming a transfer layer on the surface-treated buffer layer.
2. The method according to claim 1 , wherein the step of increasing surface roughness of the buffer layer is performed using oxygen ions or radical-based gases.
3. The method according to claim 1 , wherein the base substrate is one of a flexible film, a plastic film, a hard substrate and a glass substrate.
4. The method according to claim 1 , wherein the transfer layer of the donor substrate is for an emission layer of an organic light emitting device.
5. The method according to claim 4 , wherein the transfer layer of the donor substrate further includes at least one selected from a group consisting of a hole injection layer, a hole transport layer, a hole blocking layer, and an electron injection layer.
6. The method according to claim 1 , wherein the buffer layer is formed of a polymer, a metal, or metal oxide.
7. A method of transferring a pattern forming material to a target substrate, comprising:
preparing a donor substrate by a process, the process comprising:
preparing a base substrate;
forming a light-to-heat conversion layer on the base substrate;
forming a buffer layer on the light-to-heat conversion layer;
increasing surface roughness of the buffer layer; and
forming a transfer layer on the surface-treated buffer layer;
irradiating laser beams on a predetermined region of the donor substrate, said laser beams converted into heat by the light-to-heat conversion layer to transform adhesion properties between the transfer layer and the light-to-heat conversion layer; and
transferring the transfer layer to the target substrate.
8. The method according to claim 7 , wherein the step of forming the donor substrate further comprises forming a primer layer on the base substrate, before forming the light-to-heat conversion layer.
9. The method according to claim 7 , wherein the buffer layer is formed of a polymer, a metal, or metal oxide.
10. A method of transferring a pattern forming material to a target substrate, comprising:
preparing a donor substrate, said donor substrate comprising a transfer layer, a light-to-heat conversion layer, and a surface-treated buffer layer interposed between said transfer layer and said light-to-heat conversion layer;
irradiating laser beams on a predetermined region of the donor substrate, said laser beams converted into heat by the light-to-heat conversion layer to transform adhesion properties between the transfer layer and the light-to-heat conversion layer; and
transferring the transfer layer to the target substrate.
11. The method according to claim 10 , wherein the surface treatment of the buffer layer is performed using oxygen ions or radical-based gases.
12. The method according to claim 10 , wherein the target substrate is included in a unit pixel of an organic light emitting display.
13. The method according to claim 12 , wherein the transfer layer of the donor substrate further includes at least one selected from a group consisting of a hole injection layer, a hole transport layer, a hole blocking layer, and an electron injection layer.