Method for fabricating forward and reverse blocking devices
View Patent ↗A power device includes a gate electrode, a source electrode, and a drain electrode provided within an active region of a semiconductor substrate of first conductivity type. A vertical diffusion region of second conductivity is provided at a periphery the active region. The vertical diffusion region extends continuously from a top surface of the substrate to a bottom surface of the substrate. The vertical diffusion region includes an upper portion having a first depth and a lower portion having a second depth that is substantially greater than the first depth.
1. A method for fabricating a power device, comprising:
providing a substrate of first conductivity, the substrate having a front side and a backside;
forming a scribe diffusion region of second conductivity at a periphery of the substrate, the scribe diffusion region extending continuously from the front side to the backside of the substrate, wherein the scribe diffusion region includes an impurity of first type and an impurity of second type that is different than the impurity of first type.
2. The method of claim 1 , further comprising:
providing a peripheral impurity region at a first scribe area on the front side of the substrate, the peripheral impurity region being provided with the impurity of first type; and
providing the impurity of second type at a second scribe area on the backside of the substrate.
3. The method of claim 1 , wherein a concentration of the impurity of first type at the peripheral impurity region is between about 10 19 to 10 20 atoms/cm 3 .
4. A method for fabricating a power device, comprising:
providing a substrate of first conductivity, the substrate having a front side and a backside;
forming an aluminum structure at a scribe area on the backside of the substrate; and
placing the substrate having the aluminum structure in an environment with a first temperature that is less than the melting point of aluminum to prevent the aluminum structure from melting.
5. The method of claim 4 , wherein the environment has oxygen to convert the aluminum structure into an aluminum oxide structure.
6. The method of claim 5 , wherein the environment is an inside of a furnace.
7. The method of claim 6 , further comprising:
increasing the temperature of the environment to over 1000 degree Celsius; and
leaving the substrate within the environment until aluminum atoms have diffused to at least a midpoint between the front and back sides of the substrate.