Transfer base substrate and method of semiconductor device
View Patent ↗A transfer base substrate comprises: a substrate; a plurality of transfer thin film circuits formed on the substrate via removing layer; a test circuit formed on the substrate for checking circuit operation; and a wiring coupling each of transfer thin film circuits with a test circuit.
1. A method of manufacturing a semiconductor device, comprising:
forming a plurality of transfer thin film circuits which are capable of being removed and transferred on a transfer base substrate;
forming a test circuit that checks circuit operation of each of the plurality of transfer thin film circuits on the transfer base substrate;
obtaining test data of each of the plurality of transfer thin film circuits after forming the plurality of transfer thin film circuits on the transfer base substrate by checking the circuit operation of each of the plurality of transfer thin film circuits via the test circuit; and
at least one of the transfer thin film circuits transferring into a substrate after obtaining.
2. A method of checking a plurality of transfer thin film circuits which are formed on a transfer base substrate, the method comprising:
checking a operation of each of the plurality of transfer thin film circuits by a test circuit that is formed on the transfer base substrate and that is coupled with the plurality of transfer thin film circuits.
3. The method of checking according to claim 2 ,
the plurality of transfer thin film circuits being arranged in a matrix on the transfer base substrate;
at least part of the test circuit being arranged along at least a part of an outer circumference of the matrix.
4. The method of checking according claim 3 ,
the test circuit including a first driver that drives at least one of the plurality of transfer thin film circuits of at least one row in the matrix and a second driver that drives at least one of the plurality of transfer thin film circuits of at least one column in the matrix;
checking at least one of the plurality of transfer thin film circuits at the intersection that is selected by at least one row by the first driver and one column by the second driver.
5. The method of checking according claim 2 , the checking including;
outputting a selecting signal from a first driver to one scanning line; and
supplying a data signal to a group of transfer thin film circuits coupled to the one scanning line.
6. The method of checking according to claim 2 , further comprising:
checking whether each of the plurality of transfer thin film circuits has defect or not.
7. A method of manufacturing a transfer base substrate, comprising:
forming a plurality of transfer thin film circuits which are capable of being removed and transferred on a substrate;
forming a test circuit for checking circuit operation of each of the plurality of transfer thin film circuits on a transfer base substrate; and
forming a wiring separating one of the plurality of transfer thin film circuits from others so as to connect each of the plurality of transfer thin film circuits with a test circuit.
8. The method of manufacturing according to claim 5 , the plurality of transfer thin film circuits are arranged in a matrix; and
at least part of the test circuit being arranged along at least a part of a outer circumference of a region where the plurality of the transfer thin film circuits are formed.
9. The method of manufacturing according to claim 6 ,
the test circuit including a first driver that drives at least one of the plurality of transfer thin film circuits of at least one row in the matrix and a second driver that drives at least one of the plurality of transfer thin film circuits of at least one column in the matrix.
10. The method of manufacturing according to claim 4 , wherein forming the wiring is formed in at least a region of one of the transfer thin film circuits.