Semiconductor device fabrication method
View Patent ↗The semiconductor device fabrication method comprising the step of forming a gate electrode on a semiconductor substrate; the step of forming a source/drain diffused layer in the semiconductor substrate on both sides of the gate electrode; the step of burying a silicon germanium layer in the source/drain diffused layer; the step of forming an amorphous layer at an upper part of the silicon germanium layer; the step of forming a nickel film on the amorphous layer; and the step of making thermal processing to react the nickel film and the amorphous layer with each other to form a silicide film on the silicon germanium layer.
1. A semiconductor device fabrication method comprising the steps of:
forming a gate electrode over a semiconductor substrate;
forming a source/drain diffused layer in the semiconductor substrate on both sides of the gate electrode;
forming a recess in the source/drain diffused layer on both sides of the gate electrode,
burying a silicon germanium layer in the recess;
forming an amorphous layer at an upper part of the silicon germanium layer;
forming a nickel film on the amorphous layer; and
making thermal processing to react the nickel film and the amorphous layer with each other to form a silicide film on the silicon germanium layer.
2. A semiconductor device fabrication method according to claim 1 , wherein
in the step of forming an amorphous layer, the amorphous layer is formed in a thickness of 20 nm or below.
3. A semiconductor device fabrication method according to claim 1 , wherein
in the step of forming a silicide film, the thermal processing is set on until the silicide film arrives at the crystallized silicon germanium layer.
4. A semiconductor device fabrication method according to claim 1 , wherein
in the step of forming an amorphous layer, the amorphous layer is formed by making the upper part of the silicon germanium layer amorphous by ion implantation.
5. A semiconductor device fabrication method according to claim 4 , wherein
in the step of forming an amorphous layer, Ar ions, Ge ions, Si ions, As ions, Sb ions, N ions, Xe ions or Kr ions are implanted into the upper part of the silicon germanium layer.
6. A semiconductor device fabrication method according to claim 1 , wherein
in the step of forming an amorphous layer, the amorphous layer is formed selectively on the silicon germanium layer.
7. A semiconductor device fabrication method according to claims 1 , wherein
in the step of forming an amorphous layer, the amorphous layer is formed on the semiconductor substrate and the silicon germanium layer and is patterned to thereby form the amorphous layer on the silicon germanium layer.
8. A semiconductor device fabrication method according to claim 6 , wherein
the amorphous layer is an amorphous silicon layer or an amorphous silicon germanium layer.
9. A semiconductor device fabrication method according to claim 7 , wherein
the amorphous layer is an amorphous silicon layer or an amorphous silicon germanium layer.
10. A semiconductor device fabrication method according to claim 1 , wherein
in the step of burying the silicon germanium layer, another silicon germanium layer is formed on the gate electrode,
in the step of forming an amorphous layer, another amorphous layer is formed on said another silicon germanium layer,
in the step of forming a nickel film, the nickel film is formed also on said another amorphous layer, and
in the step of making thermal processing, the nickel film and said another amorphous layer are further reacted with each other to thereby form another nickel silicide film on said another silicon germanium layer.
11. A semiconductor device fabrication method according to claim 1 , further comprising, after the step of forming a nickel silicide film,
the step of etching off an unreacted part of the nickel film selectively with a chemical liquid of a mixture of sulfuric acid and hydrogen peroxide.
12. A semiconductor device fabrication method according to claim 1 , further comprising, after the step of forming a nickel silicide film,
the step of etching off an unreacted part of the nickel film selectively with a chemical liquid of a mixture of hydrochloric acid, hydrogen peroxide and water.
13. A semiconductor device fabrication method according to claim 1 , wherein
in the step of forming a nickel film, the nickel film is formed by sputtering.