High voltage transistor and method for fabricating the same
View Patent ↗A high voltage transistor operating through a high voltage and a method for fabricating the same are provided. The high voltage transistor includes: an insulation layer on a substrate; an N + -type drain junction region on the insulation layer; an N − -type drain junction region on the N + -type drain junction region; a P − -type body region provided in a trench region of the N − -type drain junction region; a plurality of gate patterns including a gate insulation layer and a gate conductive layer in other trench regions bordered by the P − -type body region and the N − -type drain junction region; a plurality of source regions contacted to a source electrode on the P − -type body region; and a plurality of N + -type drain regions contacted to the N − -type drain junction region and individual drain electrodes.
1. A method for fabricating a high voltage transistor, comprising:
preparing a substrate including an insulation layer and a silicon layer formed on the insulation layer;
patterning the silicon layer to definite a transistor region;
forming a highly concentrated drain junction region of a first conductive type by implanting a first conductive type impurity to the transistor region;
forming a drain junction region of the first conductive type on the highly concentrated drain junction region of the first conductive type by growing an epitaxial layer of the first conductive type;
forming a body region of a second conductive type in a predetermined portion of the drain junction region of the first conductive type;
forming a plurality of gate patterns in other predetermined portions of the drain junction region bordered by the body region of the second conductive type and the drain junction region of the first conductive type; and
forming a plurality of highly concentrated drain regions of the first conductive type and a plurality of highly concentrated source regions of the first conductive type by implanting the first conductive type impurity to the drain junction region of the first conductive type and the body region of the second conductive type.
2. The method of claim 1 , wherein the first conductive type impurity is an N-type impurity and the second conductive type impurity is a P-type impurity.
3. The method of claim 1 , wherein the first conductive type impurity is a P-type impurity and the second conductive type impurity is an N-type impurity.
4. The method of claim 1 , wherein the first conductive type impurity is phosphorous.
5. The method of claim 1 , wherein the second conductive type impurity is boron.
6. The method of claim 1 , further including forming a highly concentrated source contact region of the second conductive type surrounded by the highly concentrated source regions of the first conductive type by implanting the second conductive type impurity.
7. The method of claim 6 , further including forming a source electrode contacted to the highly concentrated source contact region of the second conductive type.
8. The method of claim 7 , further including forming a plurality of drain electrodes contacted to the highly concentrated drain regions of the first conductive type.
9. The method of claim 1 , wherein the forming of the plurality of gate patterns includes:
forming a plurality of trench type openings, each contacted to the body region of the second conductive type and the drain junction region of the first conductive type;
forming a gate insulation layer over the openings;
forming a conductive layer on the gate insulation layer filling the openings; and
removing the conductive layer such that the conductive layer remains inside of the openings.
10. The method of claim 1 , wherein the predetermined portions of the drain junction region of the first conductive type are formed in the shape of a trench.