Insulated gate semiconductor device and method of manufacturing the same
View Patent ↗A trench MOSFET includes mesa regions between the trenches. The mesa regions are connected to an emitter electrode to fix the mesa region potential so that the mesa regions do not form a floating structure. P-type base regions are distributed in the mesa regions, and the distributed p-type base regions (e.g., the limited regions in the mesa regions) are provided with an emitter structure. The trench MOSFET can lower the switching losses, reducing the total losses while suppressing the ON-state voltage drop of the trench IGBT as low as the ON-state voltage drop of the IEGT, and improving the turn-on characteristics thereof. The trench MOSFET also can reduce the capacitance between the gates and the emitter thereof, since the regions where the gate electrode faces the emitter structure are reduced. The trench MOSFET can have trench gate structures set at a narrow interval to relax the electric field localization to the bottom portions of the trenches and obtain a high breakdown voltage. The trench MOSFET narrows the mesa region width between the trenches such that the portions of the n-type layer in the mesa regions extending between the trenches are depleted easily by applying a voltage of around several volts.
1. An insulated gate bipolar transistor device comprising:
a semiconductor substrate having a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type, which is opposite of the first conductivity type, on a surface of the first semiconductor layer;
stripe-shaped trenches formed in a surface of the second semiconductor layer;
third semiconductor regions of the first conductivity type in the surface of the second semiconductor layer arranged between every other of the trenches along a direction perpendicular to a longitudinal direction of the trenches so that the third semiconductor regions are alternately arranged with surface regions of the second semiconductor layer existing between the trenches along the surface of the second semiconductor layer;
at least one fourth semiconductor region of the second conductivity type selectively formed in at least one surface portion of the third semiconductor regions;
a gate electrode in each of the trenches with a gate oxide film interposed between the gate electrode and the respective trench;
an emitter electrode in direct contact with the third semiconductor regions and the fourth semiconductor regions;
a collector electrode in contact with the first semiconductor layer; and
an interlayer insulator film covering the surface regions of the second semiconductor layer to prevent the emitter electrode from contacting the surface regions of the second semiconductor layer.
2. The insulated gate bipolar transistor device according to claim 1 , wherein a ratio of a sum of surface areas of the third semiconductor regions and the fourth semiconductor regions to a surface area of the first semiconductor layer is 80% or lower and 10% or higher.
3. The insulated gate bipolar transistor device according to claim 1 , wherein the third semiconductor regions and the fourth semiconductor regions are connected electrically to each other through the emitter electrode.
4. The insulated gate bipolar transistor device according to claim 1 , wherein the trenches are arranged at an equal interval and a width W of regions sandwiched between the trenches satisfies the following condition W<0.186V 1/2 , where V represents the rated voltage of the insulated gate bipolar transistor device.
5. The insulated gate bipolar transistor device according to claim 1 , wherein the third semiconductor regions are also alternately arranged with the surface regions of the second semiconductor layer between each adjacent pair of trenches along the longitudinal direction of the trenches so that the third semiconductor regions are aligned diagonally to form a checkered pattern with the surface regions of the second semiconductor layer.
6. The insulated gate bipolar transistor device according to claim 2 , wherein the trenches are arranged at an equal interval and a width W of regions sandwiched between the trenches satisfies the following condition W<0.186V 1/2 , where V represents the rated voltage of the insulated gate bipolar transistor device.
7. The insulated gate bipolar transistor device according to claim 2 , wherein the third semiconductor regions and the fourth semiconductor regions are connected electrically to each other through the emitter electrode.
8. The insulated gate bipolar transistor device according to claim 3 , wherein the trenches are arranged at an equal interval and a width W of regions sandwiched between the trenches satisfies the following condition W<0.186V 1/2 , where V represents the rated voltage of the insulated gate bipolar transistor device.
9. The insulated gate bipolar transistor device according to claim 7 , wherein the trenches are arranged at an equal interval and a width W of regions sandwiched between the trenches satisfies the following condition W<0.186V 1/2 , where V represents the rated voltage of the insulated gate bipolar transistor device.
10. A method of manufacturing an insulated gate bipolar transistor device, comprising the steps of:
providing a semiconductor substrate having a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type, which is opposite of the first conductivity type, on a surface of the first semiconductor layer;
forming stripe-shaped trenches in a surface of the second semiconductor layer;
forming third semiconductor regions of the first conductivity type in the surface of the second semiconductor layer and arranged between every other of the trenches along a direction perpendicular to a longitudinal direction of the trenches so that the third semiconductor regions are alternately arranged with surface regions of the second semiconductor layer existing between the trenches along the surface of the second semiconductor layer;
selectively forming at least one fourth semiconductor region of the second conductivity type in at least one surface portion of each of the third semiconductor regions;
forming a gate electrode in each of the trenches with a gate oxide film interposed between the gate electrode and the respective trench;
forming an emitter electrode in direct contact with the third semiconductor regions and the fourth semiconductor regions;
forming a collector electrode in contact with the first semiconductor layer; and
forming an interlayer insulator film covering the surface regions of the second semiconductor layer to prevent the emitter electrode from contacting the surface regions of the second semiconductor layer.
11. The method according to claim 10 , wherein the third semiconductor regions are also alternately arranged with the surface regions of the second semiconductor layer between each adjacent pair of trenches along the longitudinal direction of the trenches so that the third semiconductor regions are aligned diagonally to form a checkered pattern with the surface regions of the second semiconductor layer.